Abstract:Ultra-sensitive and selective moisture sensors are needed in various industries for processing control or environmental monitoring. As an outstanding sensor platform, surface-stress sensing microcantilevers have potential application in moisture detection. To enlarge the deflection of the microcantilever under surface stress induced by specific reactions, a new SiO 2 microcantilever is developed which features a much lower Young’s modulus than conventional Si or SiN x microcantilevers. For comparing SiO 2 cantilever with Si cantilevers, a model of the cantilever sensor is given by using both analysis and simulation, resulting in good agreement with the experimental data. The results demonstrate the SiO 2 cantilever can achieve a much higher sensitivity than the Si cantilever. In order to fabricate this device, a new fabrication process using isotropic combined with anisotropic dry etching to release the SiO 2 microcantilever beam by ICP (Inductively Coupled Plasma) was developed and investigated. This new process not only obtains a high etch rate at 9.1 μm/min, but also provides good profile controllability, and a flexibility of device design. Attributed to the high sensitivity, a significant deflection amplitude of the surface modified SiO 2 microcantilever was observed upon exposure to 1% relative humidity. The SiO 2 cantilevers are promising for inexpensive and highly sensitive moisture detection.

Chemisorption-Induced Microcantilever Deflection: A Theoretical Model

Theoretical Analysis of Chemisorption-Induced Surface Stress

Deflection and Resonance Frequency Shift of A Microcantilever Induced by Chemisorption: Oxygen on Si(100)

Theoretical Analysis of Adsorption-Induced Microcantilever Bending

Chemisorption-Induced Resonance Frequency Shift of A Microcantilever

Molecular Mechanics Modelling and Simulation of the Adsorption-Induced Surface Stress in Micro-Nano-Cantilever Sensors

Micromechanical Measurement of Active Sites on Silicon Nitride Using Surface Free Energy Variation

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Surface Stress Induced by Interactions of Adsorbates and Its Effect on Deformation and Frequency of Microcantilever Sensors

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Theoretical Analysis of Resonance Frequency Change Induced by Adsorption

Approaches To Increasing Surface Stress For Improving Signal-To-Noise Ratio Of Microcantilever Sensors

Microcantilever Biosensors Based on Conformational Change of Proteins.

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Mechanics of Surface Enhanced Microcantilever Sensors

Detection of Ph Variation Using Modified Microcantilever Sensors

Modeling of Photoinduced Deformation in Silicon Microcantilever

Theoretical Study on Photo-Induced-Deforming Silicon Microcantilevers

Chemisorption Sensing and Analysis Using Silicon Cantilever Sensor Based on N-Type Metal–oxide–semiconductor Transistor

Monitoring Of Molecule Adsorption And Stress Evolutions By In-Situ Microcantilever Systems