Abstract:¶ Corresponding authors Advances in the field of micro/nano-electro-mechanical systems (MEMS and NEMS) now offer unique opportunities in the design of small and ultrasensitive analytical methods. MEMs/NEMs have demonstrated their unique advantages when they are combined with chemistry and biology, including fast, real-time responses. In addition, MEMs and NEMS are small enough to be integrated into other devices. One of the most promising MEMs is microcantilevers, which have been proven to be an outstanding transducer for chemical and biological sensors. This review summarizes the receptors and immobilization approaches reported for nanomechanical sensors and interpret the mechanism and dynamic relationship of recognition induced nanomechanical motions. Since the three pioneer papers (1-3) published in 1994, the micro/nanocantilever sensor technology had boomed and become a promising sensor technology. Microcantilever sensors have several advantages over many other sensor technologies, including faster response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. SEM pictures of microcantilevers are shown in Fig. (1). Microcantilevers are miniature diving boards that are micromachined from silicon or other materials. The length of these cantilevers is often in the range of 100-200 microns while the thickness ranges from 200 -1000 nm; Recent advances in micromachining cantilever beams that can detect extremely small forces and mechanical stresses promise to bring about a revolution in the field of chemical, physical, and biological sensor development.

Chemisorption-Induced Resonance Frequency Shift of A Microcantilever

Deflection and Resonance Frequency Shift of A Microcantilever Induced by Chemisorption: Oxygen on Si(100)

Theoretical Analysis of Resonance Frequency Change Induced by Adsorption

Chemisorption-Induced Microcantilever Deflection: A Theoretical Model

Theoretical Analysis of Adsorption-Induced Microcantilever Bending

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Fabrication and characterization of SiO2 microcantilever for microsensor application

Chemical Specificity in Nanomechanical Sensors

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Theoretical Analysis of Chemisorption-Induced Surface Stress

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Detection of Ph Variation Using Modified Microcantilever Sensors

Ultrasensitive detection of CrO4(2-) using a microcantilever sensor.

Micromechanical Measurement of Active Sites on Silicon Nitride Using Surface Free Energy Variation

In situ detection of calcium ions with chemically modified microcantilevers

Review—Reaction-Based Microcantilever Sensors

Simulation of SiO2-based Piezoresistive Microcantilevers

Chemisorption Sensing and Analysis Using Silicon Cantilever Sensor Based on N-Type Metal–oxide–semiconductor Transistor

Chemical and Biological Sensors Based on Microcantilever Structure

Molecular Mechanics Modelling and Simulation of the Adsorption-Induced Surface Stress in Micro-Nano-Cantilever Sensors