Abstract:¶ Corresponding authors Advances in the field of micro/nano-electro-mechanical systems (MEMS and NEMS) now offer unique opportunities in the design of small and ultrasensitive analytical methods. MEMs/NEMs have demonstrated their unique advantages when they are combined with chemistry and biology, including fast, real-time responses. In addition, MEMs and NEMS are small enough to be integrated into other devices. One of the most promising MEMs is microcantilevers, which have been proven to be an outstanding transducer for chemical and biological sensors. This review summarizes the receptors and immobilization approaches reported for nanomechanical sensors and interpret the mechanism and dynamic relationship of recognition induced nanomechanical motions. Since the three pioneer papers (1-3) published in 1994, the micro/nanocantilever sensor technology had boomed and become a promising sensor technology. Microcantilever sensors have several advantages over many other sensor technologies, including faster response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. SEM pictures of microcantilevers are shown in Fig. (1). Microcantilevers are miniature diving boards that are micromachined from silicon or other materials. The length of these cantilevers is often in the range of 100-200 microns while the thickness ranges from 200 -1000 nm; Recent advances in micromachining cantilever beams that can detect extremely small forces and mechanical stresses promise to bring about a revolution in the field of chemical, physical, and biological sensor development.

Chemisorption Sensing and Analysis Using Silicon Cantilever Sensor Based on N-Type Metal–oxide–semiconductor Transistor

⟨ 100 ⟩ N-Type Metal-Oxide-semiconductor Field-Effect Transistor-Embedded Microcantilever Sensor for Observing the Kinetics of Chemical Molecules Interaction

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Detection of Ph Variation Using Modified Microcantilever Sensors

Micromechanical Measurement of Active Sites on Silicon Nitride Using Surface Free Energy Variation

Chemical Specificity in Nanomechanical Sensors

Fabrication and characterization of SiO2 microcantilever for microsensor application

Fabrication of SiO $_{2}$ Microcantilever Using Isotropic Etching With ICP

Ultrasensitive detection of CrO4(2-) using a microcantilever sensor.

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Microcantilever Humidity Sensor Based On Embedded Nmosfet With < 100 >-Crystal-Orientation Channel

Chemisorption-Induced Resonance Frequency Shift of A Microcantilever

Theoretical Analysis of Chemisorption-Induced Surface Stress

A Chemisorption-Based Microcantilever Chemical Sensor for the Detection of Trimethylamine

Chemisorption-Induced Microcantilever Deflection: A Theoretical Model

Cantilever-based Transducer for Molecules Configuration Research

Chemical and Biological Sensors Based on Microcantilever Structure

Deflection and Resonance Frequency Shift of A Microcantilever Induced by Chemisorption: Oxygen on Si(100)

Novel Insights into the Unique Intrinsic Sensing Behaviors of 2D Nanomaterials for Volatile Organic Compounds: from Graphene to MoS2 and Black Phosphorous

Interface Engineering of Si Hybrid Nanostructures for Chemical and Biological Sensing