1S1R Device with Self-Compliance Property for High Density Cross-Point Memory Applications

Xinyi Li,Huaqiang Wu,Ning Deng,He Qian
DOI: https://doi.org/10.1109/nvmts.2015.7457494
2015-01-01
Abstract:A RRAM cell integrated with a selector was fabricated. The device with 1S1R structure has Pt/Al 2 O 3 /NbO 2 /TaOy/Ta 2 O 5-x /Pt stacks. Al 2 O 3 serves as the current compliance layer. NbO 2 layer works as the threshold switching selector. TaOy is the base layer for resistive switching. The RRAM switching is based on the conduction filaments formed and ruptured in the Ta 2 O 5-x layer. For the fabricated device, nonlinearity of LRS state at read voltage and 1/2 read voltage is about 30. The ON/OFF ratio of the device is more than 100.
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