Abstract:N-, P-, and Na-doped ZnO films with c-axis orientation were produced by pulsed laser deposition using N2O or O-2 as the reaction gas. The effects of deposition temperature and deposition pressure on the lattice structure, morphology, and electric conduction have been investigated. High gas pressure leads to large-sized grains with large grain barriers, which cause a reduced mobility. P acts as an acceptor and the number of compensating defects in the P-doped film is reduced under high O-2 pressure. Na also acts as an acceptor, and the effects of high temperature on Na-doped films are encouraging as the solubility of the dopant is high. However, high temperature may cause less incorporation of N and P in the film. In the present work, p-type conduction has not been obtained in N- and P-doped films despite a wide range of processing parameters employed. Na-doped films display an increasing trend towards p-type films at high temperatures and high O-2 pressures. These results provide an insight on how these dopants behave in ZnO films and indicate that the careful selection of the deposition conditions is necessary in order to obtain p-type films by pulsed laser deposition.

Structure and Electric Conduction in Pulsed Laser-Deposited ZnO Thin Films Individually Doped with N, P, or Na

Preparation and Characterization of Na-doped ZnO Thin Films by Sol–gel Method

Surface Morphology and Optical Properties of Na-doped ZnO Thin Films

Influence of Dopant Content on Morphology and Optical Constants of ZnO:Na Films by Sol-Gel Method

Preparation of Na Delta-Doped P-Type ZnO Thin Films by Pulsed Laser Deposition Using NaF and ZnO Ceramic Targets

Synthesis and Properties of P-Type Nitrogen-Doped ZnO Thin Films by Pulsed Laser Ablation of a Zn-rich Zn3N2 Target

Realization of Na-doped P-Type Non-Polar A-Plane Zn1−xCdxO Films by Pulsed Laser Deposition

P-Type Behavior in Na-doped ZnO Films and ZnO Homojunction Light-Emitting Diodes

Effect of Oxygen Pressure on Structural and Electrical Properties of Pulsed Laser Deposition-Derived Zn0.95mg0.05o: Li Thin Films

The Fabrication of Na Doped P-Type Zn1−xMgxO Films by Pulsed Laser Deposition

Investigation on Na Acceptor Level in P -Type Na-Doped ZnMgO Thin Films Prepared by Pulsed Laser Deposition

Preparation and Properties of P-Type Ag-doped ZnMgO Thin Films by Pulsed Laser Deposition

Na Doping Concentration Tuned Conductivity of ZnO Films Via Pulsed Laser Deposition and Electroluminescence from ZnO Homojunction on Silicon Substrate

Study of Structural and Electrical Properties of Phosphorus-Doped p-Type ZnO Thin Films

Growth of Na doped p-type non-polar a-plane ZnO films by pulsed laser deposition

Effect of Na Doping Content on the Structural and Electrical Properties of ZnO∶Nax Films

P-Type Behavior of Nitrogen Doped, Lithium Doped, and Nitrogen-Lithium Codoped Zn0.11mg0.89o Thin Films

Electrical And Optical Properties Of Phosphorus-Doped P-Type Zno Films Grown By Metalorganic Chemical Vapor Deposition

Local P-Type Conduction of Na-doped ZnO Thin Films Grown by MOCVD

Fabrication of P-Type Li-Doped Zno Films by Pulsed Laser Deposition

Carrier Type- and Concentration-Dependent Absorption and Photoluminescence of ZnO Films Doped with Different Na Contents