Effect of Na Doping Content on the Structural and Electrical Properties of ZnO∶Nax Films

郑展,陈凌翔,叶志镇
DOI: https://doi.org/10.14136/j.cnki.issn1673-2812.2013.01.020
2013-01-01
Abstract:Na-doped ZnO∶Nax films were prepared by pulsed laser deposition(PLD),and the effect of Na doping content on the structural,electrical and optical properties were investigated.X-ray diffraction results shows that all ZnO∶Nax films(x≤5%) are wurtzite,with the preferential orientation of(002).Conduction behavior conversion from n type to p type with increasing Na doping content was discovered,and high performance p-type film was obtained at Na of 2%.X-ray photoelectron spectroscopy(XPS) results reveal that the p type behavior resulting from Na doping content increasing can be attributed to the formation of NaZn acceptor.For p-type ZnO∶Na0.02 film,the resistivity,mobilty and hole concentration are 53.5Ωcm,0.55cm2V-1s-1 and 2.1×1017cm-3 respectively.Moreover,room temperature photoluminescence(PL) spectra show strong near-band-gap emission in the ZnO∶Na0.02 film.
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