Fabrication of Na-N Codoped P-Type ZnO Films by RF Reactive Magnetron Sputtering and Post-annealing

林兰,叶志镇,龚丽,别勋,吕建国,赵炳辉
2010-01-01
Chinese Journal of Luminescence
Abstract:Na-N co-doped p-type ZnO [ZnO:(Na,N)] thin films were prepared on glass substrates by RF reactive magnetron sputtering and post-annealing techniques in the N2O ambient.X-ray diffraction (XRD) measurements showed that all films possessed a good crystallinity with c-axis preferential orientation.After annealing,the intensity of the (002) diffraction peak and the value of 2θ increase and the FWHM decreases.Hall measurements showed that the electrical properties of ZnO:(Na,N) films were improved after annealing and the p-type behavior was realized.The film annealed at 450 ℃ showed the lowest resistivity of 139.2 Ω·cm with a Hall mobility of 0.2 cm2·V-1·s-1 and a carrier concentration of 2.5×1017 cm-3.XPS measurements showed that NaZn acceptor in ZnO:(Na,N) is responsible for the p-type conductivity of the ZnO:(Na,N).In addition,Na-N complex may exist in the films,which acts as acceptor.Detailed investigation is now in progress.
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