Hot Carrier Degradation Accompanied by Recovery in InSnZnO Thin-Film Transistors

Meng Zhang,Zhendong Jiang,Sunbin Deng,Zhiying Chen,Xiaotong Ma,Ching-Ho Tien,Lung-Chien Chen,Man Wong,Hoi-Sing Kwok
DOI: https://doi.org/10.1109/led.2023.3277823
IF: 4.8157
2023-01-01
IEEE Electron Device Letters
Abstract:In this letter, the reliability of InSnZnO thin-film transistors (TFTs) under hot carrier (HC) stress is systematically studied. HC degradation accompanied by recovery is observed for the first time in InSnZnO TFTs. The acceptor-like trap state generation and electron trapping into gate insulator (GI) jointly degenerate the device, and electron detrapping from GI and hole injection into GI jointly recover the device meanwhile. The self-weakening of HC effect with stress time and the vertical electric field enhancement jointly trigger the domination of the recovery effect.
engineering, electrical & electronic
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