P‐1.5: Dynamic Current Stress‐Induced Instabilities of A‐ingazno TFTs

Fayang Liu,Yuheng Zhou,Xiaoliang Zhou,Huan Yang,Zhihe Xia,Fion Sze Yan Yeung,Man Wong,Hoi Sing Kwok,Shengdong Zhang,Lei LU
DOI: https://doi.org/10.1002/sdtp.16031
2022-01-01
SID Symposium Digest of Technical Papers
Abstract:The degradation and breakdown behaviors of top‐gate self‐aligned a‐InGaZnO thin‐film transistors (TFTs) under dynamic current stresses (DCSs) were systematically investigated. Both linear‐ and saturation‐regime DCSs were found to be capable of causing the self‐heating degradations, including the negative shift of threshold voltage, the increase of subthreshold slope and drain current. While the linear DCS eventually forms a conductor‐like channel, the saturation DCS causes an additional hot carrier (HC) effect to form a defective drain regions of high energy barrier, disconnecting the conductor channel from the drain side.
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