P‐13: Electrical Characteristics and Stability of Double‐Gate A‐igzo Thin Film Transistors with Self‐Aligned Top‐Gate

Xiaodong Zhang,Xuan Deng,Huan Yang,Xiaoliang Zhou,Letao Zhang,Shengdong Zhang
DOI: https://doi.org/10.1002/sdtp.12131
2018-01-01
Abstract:In this paper, the electrical characteristics and stability of double‐gate (DG) a‐IGZO TFTs with self‐aligned top‐gate are investigated. The stability of DG TFTs deteriorated as the a‐IGZO layer thickness decreased from 40nm to 20nm, and an abnormal positive Vth shift under NBS might be due to the ion migration in stronger vertical electric field.
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