Two-step Degradation of A-Ingazno Thin Film Transistors under DC Bias Stress

Chun-Feng Hu,Tong Teng,Xin-Ping Qu
DOI: https://doi.org/10.1016/j.sse.2018.11.005
IF: 1.916
2018-01-01
Solid-State Electronics
Abstract:A unified explanation is proposed to consistently explain the two-step degradation of amorphous InGaZnO (a-IGZO) thin film transistors (TFTs) under DC positive bias temperature instability (PBTI) stress without or with different drain stress voltages (V-ds). For PBTI stress without stress V-ds , this initial negative Vth shift is believed to be induced by donor-like defect states corresponding to H2O molecule and intrinsic defects, while for PBTI stress with stress V-ds, the negative shift is believed to be induced by donor-like defect states corresponding to oxygen vacancies. The gate-bias-induced electron trapping mechanism is responsible for positive Vth shift. These transitions from negative to positive Vth shift are resulted from the competition between the donor-like states creation and electron trapping.
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