Programmable On-Chip Esd Protection Using Nanocrystal Dots Mechanism And Structures
Zitao Shi,Xin Wang,Jian Liu,Lin Lin,Hui Zhao,Qiang Fang,Li Wang,Chen Zhang,Siqiang Fan,He Tang,Bei Li,Albert Wang,Jianlin Liu,Yuhua Cheng
DOI: https://doi.org/10.1109/TNANO.2012.2204767
2012-01-01
IEEE Transactions on Nanotechnology
Abstract:This paper reports a new nanocrystal quantum-dot (NC-QD)-based tunable on-chip electrostatic discharge (ESD) protection mechanism and structures. Experiments validated the programmable ESD protection concept. Prototype structures achieved an adjustable ESD triggering voltage range of 2.5 V, very fast response to ESD transients of rising time t(r) similar to 100 ps and pulse duration t(d) similar to ns, ESD protection density of 25 mA/mu m in human body model and 400 mA/mu m in charged device model equivalent stressing, and a very low leakage current of I-leak similar to 15 pA. The NC-QD ESD protection concept can potentially be used to design field-programmable on-chip ESD protection circuitry for mixed-signal ICs in nanoscales.