Abstract:Optical surfaces with high quality have been widely applied in high-tech industries for their excellent performances. To precision manufacture those surfaces efficiently and effectively, various machining technologies involved become extremely crucial. As one of the promising ultra-precision machining technologies, inflated or solid elastic tool polishing has attracted more attention for its own superiority. However, there is still lack of understanding on material removal mechanisms especially with the consideration of curvature effect, and it is of great importance to determine the surface quality and form control in ultra-precision polishing process. In this paper, originating from the famous macro-scale Preston equation, the curvature effect-based material removal model in polishing using a flexible ball-end tool has been developed successfully on the basis of two key sub-models, one is the generic model of effective relative velocity and the other refers to the semi-experimental contact pressure model. A series of spot polishing experiments subsequently are conducted on concave surfaces with a curvature radius range from 75 mm to 225 mm. The experimentally measured section profiles of polishing spots do match well with the predicted data, which verifies the effectiveness of the proposed material removal model. On the measured polishing spots, it is also observed that there have two nonuniform material removal phenomena, one is analyzed along the central axis and the other is discussed by two regions symmetrical about the central axis. Compared with the effective relative velocity, it is found that, the contact pressure is more sensitive to curvature effect by investigating the variation of maximum removal depth within a broader curvature radius range from 75 mm to 1000 mm. This study can provide a valuable foundation for polishing optical surfaces with deterministic removal.

Effect of Shape and Size of Polishing Pad on Material Removal Characteristic

Study on the Removal Function of Annular Polishing Pad Based on the Computer Controlled Polishing Technology

Effects of Curvature on Material Removal in NC Polishing of Aspheric Part

Numerical Simulation and Experimental Validation of Fixed Abrasive Grinding Pad Topography

Influence of the Shape of Polishing Tools on the Surface Roughness in Magneto-rheological Finishing

Effects of abrasive size distribution in chemical mechanical planarization: Modeling and verification

Theoretical and experimental analysis for the surface shape evolution of ultrathin workpiece considering the pad surface shape in double-sided polishing

Study on the influence of the relative position of the polishing pad to the removal quantity in two-axis lapping/polishing mode

Enhanced Material Removal Modeling in Cylindrical Bonnet Tool Polishing: Incorporating Time-Dependent Pad Wear Effects

An Investigation on the Chemical Effect in Chemo-Mechanical Polishing

Effect of Pad Wear on Tool Influence Function in Robotic Polishing of Large Optics

Analysis on Pad Effects in Chemical Mechanical Polishing

Effect of Feed Velocity Change on Amount of Material Removal for Free Abrasive Polishing with Sub-Aperture Pad

Study on Material Removal Theoretical Model of Zone Polishing Technology

Prediction of Pad Wear Profile and Simulation of Its Influence on Wafer Polishing

Modeling and analysis of the material removal depth for stone polishing

Curvature effect-based modeling and experimentation of the material removal in polishing optical surfaces using a flexible ball-end tool

A Model for Mechanical Wear and Abrasive Particle Adhesion during the Chemical Mechanical Polishing Process

The effect of polishing tool path on polishing parameters

A chemical mechanical polishing model incorporating both the chemical and mechanical effects

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces