Inclined Dislocation Generation in Compressive-Strain-Enhanced Mg-Doped GaN/Al0.15Ga0.85N Superlattice with AlN Interlayer

lei li,ding li,qiyuan wei,weihua chen,zhijian yang,jiejun wu,g zhang,xiaodong hu
DOI: https://doi.org/10.7567/APEX.6.061002
IF: 2.819
2013-01-01
Applied Physics Express
Abstract:The a- and a + c-type threading dislocation (TD) inclinations were observed in Mg-doped tensile-strained GaN/Al0.15Ga0.85N superlattice (SL) with a high-temperature (HT) AlN interlayer (IL). Most of the inclined dislocations are a-type, toward the equivalent [1 (1) over bar 00] line direction, following dislocation climb model, while a + c-type dislocations gliding on (1 (1) over bar 01) second slip plane inclined toward the [11<2)over bar>0] line direction. The analysis by comparing samples gave no evidence of Mg dopants to affect the TD inclination. The stress evolution, specifically, the stress transformation of the tensile-stress-relieved AlGaN barrier to the compressive-strain-enhanced GaN well caused by the HT-AlN IL, dominantly affected the a- and a + c-type TD inclinations. (C) 2013 The Japan Society of Applied Physics
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