Abstract:We irradiate the single crystal boron-doped silicon (Si) at various laser fluences with 100 laser shots in ambient air at room temperature using an Nd:YAG laser and investigate its surface morphology and optical properties. The optical microscopy gives evidence of the formation of a crater and reveals that the heat-affected zone and melted area are increased with increase in laser fluence from 1.1 to 15.4 J/cm2. The micrographs obtained by scanning electron microscopy (SEM) show that the micro- and nano-structures such as microcracks, bubbles, nucleation sites, clusters, redeposited layered material, nanoparticles, and alike water droplet structures are formed on a laser-exposed Si surface. The optical profilometry of the irradiated Si further confirms the ablation and redeposition of the material and shows that the depth of the crater is increased from 12.1 to 15.2 μm with increase in fluence from 1.1 to 15.4 J/cm2. Raman spectroscopy of the samples shows that the irradiation generates anneal effects due to higher temperature, which increases the crystallinity of the Si. The ellipsometric analysis shows that the irradiation of Si with increasing laser fluence changes its optical constants (refractive index and extinction coefficient), which further influence its optical properties, e.g., reflectivity, absorptivity, and energy bandgap. The absorptivity of laser irradiated Si tends to increase with increasing laser fluence, and the energy bandgap is decreased accordingly due to increase in structural disorders. Our study shows that the controlled laser irradiation can tune the energy bandgap of exposed Si, and it makes the Si materials useful for the fabrication of optoelectronic devices such as solar cells, photovoltaic cells, and LEDs.

Surface Morphology and Infrared Absorption of Silicon Irradiated by Picosecond Laser Pulses in Sf6

Infrared Light Absorption and Emissivity of Silicon Microstructured by Femtosecond Laser in SF6

Microstructure Evolution And Ft-Ir Spectra Of Silicon Induced By Pulsed Laser Irradiation

Broad band enhanced infrared light absorption of a femtosecond laser microstructured silicon

Investigation of the Structure and Optical Absorption of Silicon Coated with a Chromium Film after Femtosecond Laser Irradiation

Strong Mid-Infrared Absorption and High Crystallinity of Microstructured Silicon Formed by Femtosecond Laser Irradiation in NF3 Atmosphere

Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

Laser Induced Plasma in the Formation of Surface-Microstructured Silicon

Greatly enhanced infrared normal spectral emissivity of microstructured silicon using a femtosecond laser

Mid-infrared Absorption of Femtosecond Laser Microstructured Silicon Formed in Different Gas Ambient

Effect of Laser Fluence on the Properties of Microstructured Silicon Solar Cells

Infrared Light Absorption of Silver Film Coated on the Surface of Femtosecond Laser Microstructured Silicon in Sf6

Infrared Absorption of Femtosecond Laser Textured Silicon under Vacuum

Scan Speed and Fluence Effects in Femtosecond Laser Induced Micro/nano-Structures on the Surface of Fused Silica

Great enhancement of infrared light absorption of silicon surface-structured by femtosecond laser pulses in N2 ambient

Femtosecond laser fabrication of silicon surface microstructures for enhanced infrared radiation under electric drive

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Investigations on Surface Morphology and Bandgap Engineering of Single Crystal Boron-Doped Silicon Irradiated by a Nanosecond Laser.

Silicon micro-structuring using ultra-short laser pulses

Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon

Surface and Structural Investigations on Laser Irradiated P-Type Silicon