Abstract:We irradiate the single crystal boron-doped silicon (Si) at various laser fluences with 100 laser shots in ambient air at room temperature using an Nd:YAG laser and investigate its surface morphology and optical properties. The optical microscopy gives evidence of the formation of a crater and reveals that the heat-affected zone and melted area are increased with increase in laser fluence from 1.1 to 15.4 J/cm2. The micrographs obtained by scanning electron microscopy (SEM) show that the micro- and nano-structures such as microcracks, bubbles, nucleation sites, clusters, redeposited layered material, nanoparticles, and alike water droplet structures are formed on a laser-exposed Si surface. The optical profilometry of the irradiated Si further confirms the ablation and redeposition of the material and shows that the depth of the crater is increased from 12.1 to 15.2 μm with increase in fluence from 1.1 to 15.4 J/cm2. Raman spectroscopy of the samples shows that the irradiation generates anneal effects due to higher temperature, which increases the crystallinity of the Si. The ellipsometric analysis shows that the irradiation of Si with increasing laser fluence changes its optical constants (refractive index and extinction coefficient), which further influence its optical properties, e.g., reflectivity, absorptivity, and energy bandgap. The absorptivity of laser irradiated Si tends to increase with increasing laser fluence, and the energy bandgap is decreased accordingly due to increase in structural disorders. Our study shows that the controlled laser irradiation can tune the energy bandgap of exposed Si, and it makes the Si materials useful for the fabrication of optoelectronic devices such as solar cells, photovoltaic cells, and LEDs.

Surface and Structural Investigations on Laser Irradiated P-Type Silicon

Investigations on Surface Morphology and Bandgap Engineering of Single Crystal Boron-Doped Silicon Irradiated by a Nanosecond Laser.

Multipulse Nanosecond Laser Irradiation of Silicon for the Investigation of Surface Morphology and Photoelectric Properties

Microstructure Evolution And Ft-Ir Spectra Of Silicon Induced By Pulsed Laser Irradiation

Surface Morphology and Infrared Absorption of Silicon Irradiated by Picosecond Laser Pulses in Sf6

Surface Damage Morphology Investigations of Silicon under Millisecond Laser Irradiation

Laser micro/nano machining of silicon

Analysis of Silicon Surface Profile of Pulsed Laser Bending Processing

Surface Modification of Single-Crystal Silicon by Hybrid Laser Treatment

Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

Novel microstructures on the surfaces of single crystal silicon irradiated by intense pulsed ion beams

Investigation of Wavelength Effects on Polycrystalline Silicon Damages Using Nanosecond Pulse Laser Irradiation

Study of the Surface Structure of the Silicon Silicon Nanocrystal During Laser Irradiation

Nanomechanical Properties of Single-Crystalline Silicon Wafer Irradiated by High-Energy Femtosecond Laser Pulses

Comparison study of the femtosecond laser-induced surface structures on silicon at an elevated temperature.

Laser Plasma Effects On Surface Damage Characteristics Of Silicon

Formation Mechanisms of Silicon Surface Structuring using Single-Multiple Nanosecond Laser Pulses in Ambient Air and Cold Plasma

Femtosecond pulsed laser-induced ablation region development on the Surface of silicon

cw laser anneal of polycrystalline silicon: Crystalline structure, electrical properties

Study of Thermal Distribution of Silicon Materials Irradiated by High Power Laser

Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon