Fabrication of large-scale spherical-cap structure and the application on n-GaN based light-emitting diodes

hongxing yin,chuanrui zhu,yan shen,haifang yang,zhe liu,changzhi gu,baoli liu,xiangang xu
DOI: https://doi.org/10.1116/1.4874611
2014-01-01
Abstract:An under exposure method based on Fresnel diffraction effect in a conventional optical lithography system is used to fabricate large-scale, uniform spherical-cap structures. This method provides an effective roughening technology on the top surface of light-emitting diodes (LEDs) to improve the light extraction efficiency of LEDs. LEDs with high duty cycle spherical-cap structures showed enhanced light output power by 130%-160% compared with the LED with a flat surface. This simple and easy shape control method has potential applications in other optical devices such as organic LEDs, inorganic solar cells, and laser diodes. (C) 2014 American Vacuum Society.
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