The design and fabrication of nanostructure on p-type GaN surface for GaN-based LEDs with high light extraction efficiency

XianPeng Zhang,Yanjun Han,Yi Luo,XiaoLin Xue,Jin Huang
DOI: https://doi.org/10.1109/INOW.2007.4302948
2007-01-01
Abstract:The parameters of nanostructure on p-GaN surface for light extraction efficiency of GaN based LEDs were studied by using Monte-Carlo ray tracing simulation, and nanostructures were fabricated by using interferential exposure and ICP dry etching.
What problem does this paper attempt to address?