Abstract:A brief overview is given on several aspects of applications of the Monte Carlo (MC) simulation method to surface-related electron spectroscopy and microscopy. For the MC modeling of electron interaction with solids, the electron inelastic scattering cross section is calculated by the use of bulk dielectric function with optical constants in a dielectric functional approach. This has enabled the systematic reproductions of the experimental energy distributions of backscattered electrons for a number of elemental materials. An improved calculation of backscattering factor for quantitative AES analysis has been performed on the basis of a new definition and by making use of the up-to-date relevant cross sections. The physical reason is given for the backscattering factor that can be less than unity for very low primary energies close to the ionization energy and/or for large incident angles. For the MC modeling of electron interaction with surfaces, the inelastic scattering of electrons moving in a surface region is treated in a self-energy formalism. The model has enabled the evaluation of the surface excitation effect through the calculation of position-dependent electron IMFP. A simulation of REELS spectra for Ag is compared with an experiment; a reasonable agreement found on the surface plasmon peak intensity normalized with elastic peak intensity thus verifies this modeling of electron interaction with surfaces. Finally, the MC simulation code has been extended to deal with complex sample geometries. By using basic building blocks to construct a complex geometry and the ray-tracing technique for correction of electron flight-step-length sampling, the structured and/or inhomogeneous sample can be modeled with reasonable flexibility. Copyright (C) 2006 John Wiley & Sons, Ltd.

Monte Carlo Simulation Of Positron Induced Secondary Electrons In Thin Carbon Foils

Thickness dependence of positron induced secondary electron emission in forward geometry from thin carbon foils

Monte Carlo analysis of the contributions of long-lived positronium to the spectra of positron-impact-induced secondary electrons measured using an annihilation-gamma-triggered time-of-flight spectrometer

Monte Carlo Study of Secondary Electron Emission

A Monte Carlo modeling of electron interaction with solids including cascade secondary electron production

Secondary Electron Emission from Carbon Foils by Ne2+ Near Bohr Velocity

Quantum Monte Carlo study of Doppler broadening of positron annihilation radiation in semiconductors and insulators

Monte Carlo Simulation of Incident Electrons Passing Through Thin Metal Layer

Simulation Study of Indirect Positron Generation by an Ultra-Short Laser

Secondary electron emission from gold microparticles in the transmission electron microscope: comparison of Monte Carlo simulations with experimental results

Monte Carlo Simulation Study of Quasi-Elastic Electron Scattering from an Overlayer/Substrate System

Monte Carlo Study of Backscattering and Secondary Electron Generation

Monte Carlo simulation of absolute secondary electron yield of Cu

Monte Carlo Simulation Study of Electron Interaction with Solids and Surfaces

Depth Distribution Functions of Secondary Electron Production and Emission

On the Energy Distribution of Secondary Electrons Emitted from Metals

Monte Carlo Simulation of Electron Transmission Through Masks in Projection Electron Lithography

Research on Secondary Electron Emission Characteristics of Metal Materials Based on Monte-Carlo Simulation

A Monte Carlo Calculation of the Secondary Electron Emission in the Backward Direction from a SiO2 Macro-Capillary

A Monte Carlo investigation of secondary electron emission from solid targets: spherical symmetry versus momentum conservation within the classical binary collision model

Secondary Electron Emission from Carbon Foils under O2+ Ion Impact