Monte Carlo Simulation Study of Quasi-Elastic Electron Scattering from an Overlayer/Substrate System

Y. G. Li,Z. M. Zhang,S. F. Mao,Z. J. Ding
DOI: https://doi.org/10.1088/0953-8984/20/35/355005
2008-01-01
Journal of Physics Condensed Matter
Abstract:Recent experimental results have shown that the recoil energies of electrons elastically scattered by light and heavy atoms can be resolved for an energetic electron beam and at large scattering angles. Full understanding of the scattering processes involved is helpful to sample characterization, and for providing more knowledge about electron inelastic mean free path. In this work we use a Monte Carlo simulation method to quantitatively study the energy shift, the Doppler broadening and, especially, the peak intensity ratio for an overlayer/substrate sample. Recoil energy in the electron elastic scattering events is calculated on the basis of our previous Monte Carlo simulation model by taking account of the kinetic energy of atoms. An anisotropic distribution of the velocity direction of the atoms, the Maxwell-Boltzmann thermal energy distribution and also the multiple scattering of electrons are considered in the simulation. By introducing a polarized momentum a good agreement has been obtained on the position shift of the quasi-elastic peak between the calculation and experiment. The calculation also shows a quantitative agreement with the experimental results on the peak intensity ratio between different elements for a Ge/C overlayer sample. It is illustrated that the multiple-scattering effect is remarkable for a high energy beam.
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