Theoretical and Experimental Studies of N(E) Spectra in Auger Electron Spectroscopy

ZJ DING,R SHIMIZU,T SEKINE,Y SAKAI

DOI: https://doi.org/10.1016/0169-4332(88)90293-0

IF: 6.7

1988-01-01

Applied Surface Science

Abstract:A new Monte Carlo simulation approach has been developed to describe the full energy spectrum, N(E), from the elastic peak in the high energy region to the slow secondary electrons in the low energy region, for kV electrons. The Monte Carlo calculations were performed for 3 kV electrons impinging on Cu, Au and Si at normal incidence and at an angle of 45°, respectively. To compare the simulation results, the EN(E) measurements were done on these elements under the same conditions using a commercial Auger microprobe, JAMP-30. It has been confirmed through the comparison that the present Monte Carlo approach describes the experiment very well. As another application of practical interest, we have simulated how the energy loss peaks of 1 kV electrons change as Cu deposition onto a Si substrate proceeds. The result clearly indicates that the plasmon loss peaks of Si substrates become unobservable with a CMA of common use when the surface coverage of Cu film becomes 5 Å thick.