Secondary electron emission from gold microparticles in the transmission electron microscope: comparison of Monte Carlo simulations with experimental results

Wen Feng,Johannes Schultz,Daniel Wolf,Sergi Pylypenko,Thomas Gemming,Kristina Weinel,Leonardo Agudo Jacome,Bernd Büchner,Axel Lubk
DOI: https://doi.org/10.1088/1361-6463/ad9840
2024-11-29
Journal of Physics D Applied Physics
Abstract:We measure the electron beam-induced current to analyze the electron-induced secondary electron emission from micron-sized gold particles illuminated by 300 keV electrons in a transmission electron microscope. A direct comparison of the experimental and simulated secondary electron emission employing Monte Carlo scattering simulations based on the GEANT4 toolkit yields overall good agreement with a noticeable discrepancy arising from shortcoming of GEANT4 scattering cross sections in the low-loss regime. Thus the electron beam-induced current analysis allows to quantify the inelastic scattering including secondary electron emission in the transmission electron microscope and provides further insight into the charging mechanisms.
physics, applied
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