Advancements in Secondary and Backscattered Electron Energy Spectra and Yields Analysis: from Theory to Applications

Simone Taioli,Maurizio Dapor

2024-08-09

Abstract:Over the past decade, experimental microscopy and spectroscopy have made significant progress in the study of the morphological, optical, electronic and transport properties of materials. These developments include higher spatial resolution, shorter acquisition times, more efficient monochromators and electron analysers, improved contrast imaging and advancements in sample preparation techniques. These advances have driven the need for more accurate theoretical descriptions and predictions of material properties. Computer simulations based on first principles and Monte Carlo methods have emerged as a rapidly growing field for modeling the interaction of charged particles, such as electron, proton and ion beams, with various systems, such as slabs, nanostructures and crystals. This report delves into the theoretical and computational approaches to modeling the physico-chemical mechanisms that occur when charged beams interact with a medium. These mechanisms encompass single and collective electronic excitation, ionization of the target atoms and the generation of a secondary electron cascade that deposits energy into the irradiated material. We show that the combined application of ab initio methods, which are able to model the dynamics of interacting many-fermion systems, and Monte Carlo methods, which capture statistical fluctuations in energy loss mechanisms by random sampling, proves to be an optimal strategy for the accurate description of charge transport in solids. This joint quantitative approach enables the theoretical interpretation of excitation, loss and secondary electron spectra, the analysis of the chemical composition and dielectric properties of solids and contributes to our understanding of irradiation-induced damage in materials, including those of biological significance.

Materials Science,Other Condensed Matter,Computational Physics

What problem does this paper attempt to address?

The paper primarily explores the physico-chemical mechanisms that occur when charged particle beams (such as electrons, protons, or ions) interact with matter, with a focus on the development and application of theoretical and computational methods. Specifically, the paper aims to address the following key issues:

1. **Understanding complex interaction mechanisms**: Investigating processes such as single and collective electron excitations, ionization of target atoms, and secondary electron cascade effects, which occur during the interaction of charged particle beams with materials.

2. **Developing theoretical and computational methods**: Accurately describing the transport behavior of charged particles in solids through first-principles methods and Monte Carlo simulations. Combining these methods can effectively explain experimental measurements, such as excitation spectra, energy loss spectra, and secondary electron spectra.

3. **Improving prediction accuracy**: Using first-principles calculations to enhance the accuracy of predicting material properties, especially when dealing with complex systems like nanostructures and crystals.

4. **Advancing simulation techniques**: Developing statistical methods (such as transport Monte Carlo simulations) to simplify calculations and reduce computational costs, particularly in processes involving collisions of a large number of particles.

5. **Application case analysis**: Demonstrating the accuracy of results at different theoretical levels through various test cases, including different types of materials such as metals, semiconductors, and insulators.

6. **Exploring material properties**: Analyzing the electrical, magnetic, optical, thermal, and structural properties of materials, especially near-surface layer characteristics, using techniques like electron energy loss spectroscopy (EELS).

In summary, the core objective of this paper is to better understand and predict the interactions between charged particle beams and matter through advancements in theoretical and computational methods, thereby promoting further development in materials science and related fields.