Rapid Growth of Bulk Gan Crystal Using Gan Powder As Source Material

Wu Huaqiang,Spinelli Joseph,Konkapaka Phanikumar,Spencer Michael G.
DOI: https://doi.org/10.1557/proc-0892-ff30-01
2005-01-01
MRS Proceedings
Abstract:Using a novel gallium (Ga) vapor transport technique, thick gallium nitride (GaN) layers have been grown using GaN powder as the source material. In this technique, GaN powder decomposes at 1100 o C into gallium and nitrogen vapors. The Ga vapors are transported to the seed substrate and reacted with ammonia to form a crystalline GaN layer. The seed was composed of a sapphire substrate with a 2 μm Hydride Vapor Phase Epitaxy (HVPE) GaN layer on it. The growth temperature was set at 1180 o C. Using this technique, growth rates as high as 500 μm/hr were achieved. The grown GaN layers were single crystal and were characterized by X-ray diffraction and scanning electron microscopy.
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