Bulk GaN Growth by Gallium Vapor Transport Technique

HQ Wu,P Konkapaka,Y Makarov,MG Spencer
DOI: https://doi.org/10.1002/pssc.200461553
2005-01-01
Abstract:GaN crystals were grown in a dedicated, resistively heated reactor at 1165 degrees C and 600 Torr. In this approach, gaseous gallium was obtained by the decomposition of GaN powder while nitrogen was provided from the dissociation of ammonia. GaN was grown at a rate of exceeding 200 mu m/hr by using this stable Ga source. GaN single crystals grown using this method were extensively characterized by X-ray diffraction (XRD), Scanning electron microscopy (SEM), Secondary Ion Mass Spectrometry (SIMS), and Glow Discharge Mass Spectrometry (GDMS).
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