Abstract:With the development of analytical instrumentation to minimization,integration and automation,the microfluidic chips,which are more integrated,complex and diversified,have been applied widely on the manufacturing of analytical instrumentation.However,the present photolithography-based microfabrication technology,which is only able to pattern microchannels with simple inside structures,can not follow the rapid development of requirements.For solving the problem,a fabrication method based on the restricting effect of laminar flow is proposed for the micro etching on isotropic substrates.Experiments were conducted inside glass-based microchannels,in which certain etchant was used to form complicated microstructures.The flow parameters’ effects on the aspect ratio,side wall profile and etching rate were revealed by the experiments.The experimental results reveal that the topography of micro structures patterned with the restricted flow etching method is mainly determined by the flowrates of separator and etchant.The computational fluid dynamics（CFD） model on the interface between multiple streams was established for the etching process,and analysis on the causes of various micro topographies was conducted based on the CFD simulation results.The experimental data consisted with the simulation results very well.The investigation depicted in this paper indicate that the flow restricted etching method provides sufficient references for the research and understanding on the mass transport at the liquid-liquid surface in the microchannel and can be used to pattern complex micro structures with high aspect ratios,meantime,it greatly enriches the microfabrication technology for microfluidic chips.

Fabrication of Glass-Based Microfluidic Devices with Dry Film Photoresists As Pattern Transfer Masks for Wet Etching

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Rapid Prototyping of Soft Lithography Masters for Microfluidic Devices Using Dry Film Photoresist in a Non-Cleanroom Setting

Micro Fabrication of Micro Fluidic Glass Chip Without Clean Room Condition

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

A Rapid and Low-Cost Procedure for Fabrication of Glass Microfluidic Devices

Micro Etching Method Inside Microchannels

A Simplified Microfabrication Technology For Production Of Glass Microfluidic Chips

Preparation of hybrid soda-lime/quartz glass chips with wettability-patterned channels for manipulation of flow profiles in droplet-based analytical systems.

Flow-restricted Etching Method on Isotropic Substrates and Its Mechanism

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Bonding of Glass-Based Microfluidic Chips at Low- or Room-Temperature in Routine Laboratory

Fabrication of microchannels by space-selective control of phase separation in glass.

Fabrication of Microfluidic Chips Using Laser Click Deposition

Glass etching to bridge micro- and nanofluidics.

A Novel Restricted-Flow Etching Method for Glass

A Low-Cost Fabrication System for Manufacturing Soft-Lithography Microfluidic Master Molds

Fabrication of Optofluidic Systems Using Isotropic Wet Etched Masters in < 111 > Silicon Wafer

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Fabrication of Perfluoropolyether Microfluidic Devices Using Laser Engraving for Uniform Droplet Production