Hetero-Epitaxy Of Iii-V Compounds Lattice-Matched To Inp By Mocvd For Device Applications

Chak Wah Tang,Haiou Li,Zhenyu Zhong,Kai Lun Ng,Kei May Lau
DOI: https://doi.org/10.1109/ICIPRM.2009.5012460
2009-01-01
Abstract:Device quality Al0.49In0.51As/Ga0.47In0.53As MHEMT structures have been grown by MOCVD on GaAs substrates, with 2-DEG mobility over 8700 cm(2)/V-s and sheet carrier density at around 4 x 10(12) cm(-2). A 150 nm T-gate transistor demonstrated unity current gain cutoff frequency (f(T)) and maximum oscillation frequency (f(max))of 279 and 231 GHz, respectively.
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