Si 3 N 4 / SiC Interface Structure in SiC-nanocrystal-embedded Α-Si3n4 Nanorods

YH Gao,Y Bando,K Kurashima,T Sato
DOI: https://doi.org/10.1063/1.1428106
IF: 2.877
2002-01-01
Journal of Applied Physics
Abstract:Si 3 N 4 / SiC interface structure in SiC-nanocrystal-embedded α-Si3N4 nanorods was studied by high-resolution transmission electron microscopy. The SiC-nanocrystal-embedded α-Si3N4 nanorods were synthesized by the method of carbothermal reduction of SiO in pure N2 atmosphere, while the SiC nanocrystals were produced from a substitution of SiC for Si3N4. Between SiC and Si3N4, there are three kinds of plane configurations and a set of orientation relationships, i.e., [11̄0]SiC//[0001]Si3N4 and nearly (111)SiC//(101̄0)Si3N4 with low-angle discrepancy of either 3° or 5°. The origin of the low-angle discrepancies was explained in terms of a reciprocal lattice theory for heteroepitaxial interfaces.
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