In-growth of an Electrically Active Defect in High-Purity Silicon after Proton Irradiation

A. Nylandsted Larsen,H. Juul Pedersen,M. Christian Petersen,V. Privitera,Y. Gurimskaya,A. Mesli
DOI: https://doi.org/10.1063/1.4841175
IF: 2.877
2013-01-01
Journal of Applied Physics
Abstract:Defect-related energy levels in the lower half of the band gap of silicon have been studied with transient-capacitance techniques in high-purity, carbon and oxygen lean, plasma-enhanced chemical-vapor deposition grown, n-and p-type silicon layers after 2-MeV proton irradiations at temperatures at or just below room temperature. The in-growth of a distinct line in deep-level transient spectroscopy spectra, corresponding to a level in the band gap at EV + 0.357 eV where EV is the energy of the valence band edge, takes place for anneal temperatures at around room temperature with an activation energy of 0.95 ± 0.08 eV. The line disappears at an anneal temperature of around 450 K. The corresponding defect is demonstrated not to contain boron, carbon, oxygen, or phosphorus. Possible defect candidates are discussed.
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