Dielectric Properties of Oriented PbZrO3 Thin Films Grown by Sol-Gel Process

JW Zhai,Y Yao,X Li,TF Hung,ZK Xu,H Chen,EV Colla,TB Wu
DOI: https://doi.org/10.1063/1.1505981
IF: 2.877
2002-01-01
Journal of Applied Physics
Abstract:Antiferroelectric PbZrO3 (PZ) films have been fabricated on LaNiO3/Pt/Ti/SiO2/Si substrates using a sol-gel process. The films with perovskite structure showed highly 〈001〉 preferred orientation. An antiferroelectric phase was identified by the presence of 1/4{110} superlattice spots in a [001] selected area electron diffraction pattern. The field-induced antiferroelectric to ferroelectric phase switching was demonstrated at room temperature with full saturation and a maximum polarization of 40 μC/cm2. Dielectric properties were investigated as a function of both temperature and frequency. The presence of a conductive buffer layer of LaNiO3 on Pt/Ti/SiO2/Si substrate enabled the growth of high quality and highly oriented PZ antiferroelectric thin films that showed near zero remanent polarization and squared hysteresis loops.
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