Effect Of Thickness Ratio Deviation On Soft-X-Ray Diffraction Of Multilayers

B Wang,Ls Xiu,Xc He,Zq Wu,Sv Redko,As Iiyushin
DOI: https://doi.org/10.1063/1.352193
IF: 2.877
1992-01-01
Journal of Applied Physics
Abstract:The simulation of soft-x-ray (lambda = 1.33-14.0 nm) -diffraction behavior at 2theta = 90-degrees of W/C and W/Si multilayers with sublayer thickness ratio (composition) deviation in periods is presented. The results show that when the deviation DELTAx > 0 (which means that the thickness fraction x = d1/d increases from the top to the bottom of the multilayers, where d1 is the thickness of the heavy element sublayer and d the period of the multilayer), (i) in the case of W/Si where the W and Si absorption coefficients are close the diffraction intensities decrease in general, while in the case of W/C where the W and C absorption coefficients are close the increase of the diffraction intensities can reach about 20%; (ii) the full-width at half-maximum of the diffraction peak always decreases; (iii) the peak position tends to move to the small-angle side.
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