Evaluating modulus and hardness enhancement in evaporated Cu/W multilayers

S WEN,R ZONG,F ZENG,Y GAO,F PAN
DOI: https://doi.org/10.1016/j.actamat.2006.07.043
IF: 9.4
2007-01-01
Acta Materialia
Abstract:The microstructure, hardness and elastic modulus of Cu/W multilayers prepared by evaporation deposition were investigated by X-ray diffraction, transmission electron microscopy and nanoindenation. The results show that the multilayers with good modulation structure have asymmetrical interfaces. The W on Cu interfaces are relatively sharp, while the Cu on W interfaces are diffuse, with significant intermixing. The intermixing results in compression of the out-of-plane interplanar spacing of the W layer. The compression increases with decreasing periodicity and leads to modulus enhancement. The hardness values also increase with decreasing periodicity, which is interpreted by the Lehoczky model.
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