X-ray Diffraction of Multilayers with a Systematic Deviation of Period

C GAO,ZM JIANG,ZG WU
DOI: https://doi.org/10.1063/1.346774
IF: 2.877
1990-01-01
Journal of Applied Physics
Abstract:The x-ray diffraction profile of multilayers with systematic deviation of period has been studied and simulated on computer. The peak shift, asymmetric peak shape, and decrease of peak intensity can be predicted. The influence is much more severe than that of random fluctuation of period.
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