Asymmetric Interface and Growth Mechanism in Sputtered W/Si and WSi2/Si Multilayers

Zehua Yang,Jingtao Zhu,Yunping Zhu,Hongxin Luo,Zhongliang Li,Hui Jiang,Li Zhao
DOI: https://doi.org/10.1016/j.apsusc.2022.154531
IF: 6.7
2022-01-01
Applied Surface Science
Abstract:This paper presents a comparative study on W/Si and WSi2/Si multilayers for analyzing the asymmetric inter-facial effect in Si-based multilayers. The interfacial characteristic, crystallization and growth mechanism of W/Si and WSi2/Si multilayers were investigated using grazing incidence X-ray reflectivity, X-ray diffraction, X-ray diffuse scattering, total external reflection X-ray diffuse scattering and Transmission Electron Microscopy. Roughness characteristics including frequency response, conformity and replication were quantitatively deter-mined from the simulation of diffuse scattering profiles and the calculation of resonant diffuse scattering sheets. The intrinsic power spectral density of W/Si and WSi2/Si multilayers was fitted to demonstrate the related growth mechanism of the interfacial roughness. The experimental results exhibit the diffusion-dominant interfaces of the W/Si multilayer are obvious asymmetric for the wider interfacial region of 0.37 nm in the W-on-Si interface than that of 0.28 nm in the Si-on-W interface. Interfaces of the WSi2/Si multilayer without the distinguishable interdiffusion present the roughness-dominant property with the asymmetric transverse relaxation. The asymmetric interfaces of W/Si and WSi2/Si multilayers were further interpreted by a modified ballistic argument with the interfacial relaxation and reaction analysis.
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