Abstract:Silane process of granular polysilicon has become a promising method for the preparation of polysilicon due to its continuous low temperature, simple process and low energy consumption. However, granular silicon contains more hydrogen than conventional columnar silicon, which can result in the deterioration of single crystal furnace thermal field life and rod stability by the “hydrogen jump” in the process of Czochralski method. Hydrogen removal has become an important problem to be solved in the industry development. Thus, we propose a hydrogen separation model suitable for silicon system based on vacuum experiment and thermodynamic calculation, which can provide a theoretical basis for the research and development of silicon dehydrogenation method. The predicted removal rate of hydrogen at different temperatures and vacuum pressures is in good agreement with the experimental results, reflecting the reasonability of the model. The results show that the hydrogen removal rate increases with the increasing of temperature and the decreasing of pressure, where temperature plays a leading role in the removal of hydrogen in silicon. At less than one atmosphere, the increase in dehydrogenation rate by 1 °C ranges from 0.01% to 0.25% in the temperature range from 1450 to 1800°CAt temperatures below 1800°Cthe maximum dehydrogenation rate is less than 0.001% for each 1pa reduction in pressure from one atmospheric pressure to 1000pa. According to the model calculation results, a hydrogen removal method is designed by using the vacuum electromagnetic induction. The deep removal of trace hydrogen in silicon has been realized, hydrogen in silicon drops rapidly from around 20 ppm to less than 5 ppm.

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CFD Simulation of the Hydrodynamic Behavior in an Internally Circulating Fluidized Bed Reactor for Producing Polysilicon Granules

Numerical simulation of granular silicon growth and silicon fines formation process in polysilicon fluidized bed

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Experimental Study on the Gas Bypassing Fraction in the Production of Polycrystalline Silicon Granules

Influence of Silicon Size Distribution on Hydrochlorination Process of Solar-grade Silicon in Spouted Reactor via MP-PIC Approach

Fluidization Characteristics of Silicon Particles with a Wide Size Distribution

A Hot-Wall Tubular Reactor for Silane Pyrolysis: Modeling and Simulation

Enhancing removal of hydrogen from granular polysilicon by innovating vacuum separation model and method for SoG-Si

CFD-Aided Design for Polysilicon Production System

Fluidized Bed Reactors for Solar-Grade Silicon and Silane Production

Experimental Fluidization Performances of Silicon Carbide in a Fluidized Bed

Numerical Simulations of Particle Growth in a Silicon-Cvd Fluidized Bed Reactor Via a CFD–PBM Coupled Model

CFD–PBM Coupled Simulation of Silicon CVD Growth in a Fluidized Bed Reactor: Effect of Silane Pyrolysis Kinetic Models

Development of a polysilicon chemical vapor deposition reactor using the computational fluid dynamics method

Electrostatic Effects on Hydrodynamics in the Riser of the Circulating Fluidized Bed for Polypropylene