Method and device for preparing high purity polysilicon particles by using fluid bed reactor

Zhanwen Wang,Chenjing Wang,Tiefeng Wang,Fei Wei,Haijian Yang

2010-01-01

Abstract:The invention discloses a method and a device for preparing high purity polysilicon particles by using a fluid bed reactor. A guide cylinder is arranged in the fluid bed reactor, the reactor is divided into two parts of a heating region and a reaction region; an annular space region between the guide cylinder and reactor walls is the heating region; the inside of the guide cylinder is the reaction region; silica fume particles are added to the reactor to form a bed layer; the solid phase percentages by volume of the bed layer of the heating region and the reaction region are enabled to be different after the bed layer in the solid phase is fluidized by adjusting fluidized gas velocities of the heating region and the reaction region, thereby the circulating flow of the particles between the heating region and the reaction region is realized and the circulation rate of the particles is adjusted. Silicon-free fluidizing gas is flowed into the heating region, a heating element is provided to heat the silica fume particles, and the polysilicon particles circularly flow between the heating region and the reaction region through a connected region below the guide cylinder in the reactor. Because silicon-containing gas is only flowed to the reaction region, the invention has the advantages of simple structure, less deposition on a wall surface, low energy consumption and the like.