Preparation method of high-purity low-radioactivity spherical silicon micropowder

侯书恩,许亮,靳洪允,刘娟
2009-06-12
Abstract:The invention discloses high-purity low-radioactivity spherical silicon micropowder. In the silicon micropowder, the content of SiO2 is not lower than 99.90 percent, the content of radioelement U is less than or equal to 1*10 g/g, sphericization ratio is between 90 and 100 percent, and non-crystalline ratio is between 99 and 100 percent. The method for preparing the silicon micropowder comprises the following steps: preparing stable silica sol which has purity not lower than 99.90 percent and the ion content of an arbitrary impurity less than or equal to 5*10 g/g by a silicon source with the content of radioelement U being less than or equal to 1*10 g/g; concentrating the silica sol to lead the solid content of the silica sol to be between 41 and 70 percent; granulating the concentrated silica sol to lead grain diameter of the silica sol to be between 0.5 and 60 [mu]m; roasting the granulated silicon oxide micropowder at a temperature of between 500 and 1,100 DEG C; and carrying out sphericization treatment on the micropowder in a flame burner and a sphericizing furnace, and classifying and collecting the micropowder after cooling to obtain the high-purity low-radioactivity spherical silicon micropowder. The spherical silicon micropowder of the invention can meet the requirement of a large-scale integrated circuit on capsulation packing, and the invention has simple process, low cost, simple required equipment, and is applicable to industrial production.
Materials Science
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