Method for preparing high purity polysilicon particle with fluidized bed and bed fluidizing reactor

Tiefeng Wang,Fei Wei,Jinfu Wang,Jie Zhu

2008-01-01

Abstract:The invention provides a method for preparing high-purity polysilicon particles with a fluidized bed and a fluidized bed reactor, the heating zone and the reaction zone of the fluidized bed are separated from each other in structure. The method for preparing high-purity polysilicon particles by a fluidized bed comprises the steps as follows: a) a fluidizing gas without silicon is inlet to the heating zone of the reactor to lead the polysilicon particles in the heating zone to be a fluidized state, the polysilicon particles are heated by a heating device; b): the heated polysilicon particles are delivered to the reaction zone to which the gas with silicon is inlet, the gas with silicon carries out thermal decomposition or reduction at the surface of the polysilicon particles, thus simple substance silicon is produced and settled on the surface of particles; c): part of polysilicon particles with 0.1-10mm particle size are taken from the lower part of the reactor as the products; d): the fine polysilicon particles which have the diameter of 0.01-1.0mm and are taken as the seed crystal are added to the upper part of the reactor to maintain the quantity of the polysilicon particles in the reactor. The method and the fluidized bed reactor of the invention have the advantages that the wall of the reactor has less silicon deposition; the reactor can operate continuously for a long period with low energy consumption, etc.