Abstract:High quality (Q) factor microdisks are fundamental building blocks of on-chip integrated photonic circuits and biological sensors. The resonant modes in microdisks circulate near their boundaries, making their performances strongly dependent upon surface roughness. Surface-tension-induced microspheres and microtoroids are superior to other dielectric microdisks when comparing Q factors. However, most photonic materials such as silicon and negative photoresists are hard to be reflowed and thus the realizations of high-Q microdisks are strongly dependent on electron-beam lithography. Herein, we demonstrate a robust, cost-effective, and highly reproducible technique to fabricate ultrahigh-Q microdisks. By using silica microtoroids as masks, we have successfully replicated their ultrasmooth boundaries in a photoresist via anisotropic dry etching. The experimentally recorded Q factors of passive microdisks can be as large as 1.5 × 106. Similarly, ultrahigh Q microdisk lasers have also been replicated in dye-doped polymeric films. The laser linewidth is only 8 pm, which is limited by the spectrometer and is much narrower than that in previous reports. Meanwhile, high-Q deformed microdisks have also been fabricated by controlling the shape of microtoroids, making the internal ray dynamics and external directional laser emissions controllable. Interestingly, this technique also applies to other materials. Silicon microdisks with Q > 106 have been experimentally demonstrated with a similar process. We believe this research will be important for the advances of high-Q micro-resonators and their applications.

Radiation-pressure-driven Mechanical Oscillations in Silica Microdisk Resonators on Chip

A Dissipative Self-Sustained Optomechanical Resonator on a Silicon Chip

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Radiation-pressure-driven micro-mechanical oscillator

High-Q Silica Microdisk Optical Resonators with Large Wedge Angles on a Silicon Chip

GHz optomechanical resonators with high mechanical Q factor in air

Greater Than One Billion Q Factor for On-Chip Microresonators

MHz-level Self-Sustained Pulsation in Polymer Microspheres on a Chip

Fabrication of SiO2 Microdisk Optical Resonator

A SILICON MEMS DISK RESONATOR OSCILLATOR DEMONSTRATING 36 PPT FREQUENCY STABILITY

Design and performance simulation of a silica microdisk cavity optical pressure sensor

Radiation-Pressure-Antidamping Enhanced Optomechanical Spring Sensing

Raman Lasing in a Silica Microdisk Resonator

Oscillatory Thermal Dynamics in High-Q PDMS-coated Silica Toroidal Microresonators.

Research on Silica Microdisk by Wet-etching

A Chip-Scale Sub-Mu G/Hz(1/2) Optomechanical Dc Accelerometer At The Thermodynamical Limit

High-Q and highly reproducible microdisks and microlasers.

High-Q Silicon Microsphere Whispering Gallery Mode Resonator Fabricated by Laser Induced In-Fiber Capillary Instability

Octave-spanning Soliton Microcomb in Silica Microdisk Resonators

Thermo-optic Oscillatory Behavior in On-Chip Lithium-Niobate Microdisk Resonators

Proton Radiation Effects on Optically Transduced Silicon Carbide Microdisk Resonators