Design and performance simulation of a silica microdisk cavity optical pressure sensor

Li Chen,Yang Lu

DOI: https://doi.org/10.1364/ao.525008

IF: 1.9

2024-05-31

Applied Optics

Abstract:Chen Li, Huayang Lu The opto-mechanical system of optical whispering-gallery mode (WGM) microcavities confines resonant photons in micro-scale resonators for a ... [Appl. Opt. 63, 4480-4485 (2024)]

optics

What problem does this paper attempt to address?

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Ding Chun,Yaqiang Wang,Yuelin Wang-,Zhonghe Jin

DOI: https://doi.org/10.1109/ICSICT.1998.786542

1998-01-01

Abstract:A flow-sensor and a resonator are fabricated on silicon substrate using the micromechanical technology. The devices are with a structure based on a silicon cantilever with waveguide on the surface to detect the movement of the silicon cantilever. The method to couple the laser into the waveguide is discussed and the performance of the fabricated devices are characterized.
A New Route for Fabricating Polymer Optical Microcavities.

Zhang,Ni Yao,Jing Pan,Lei Zhang,Wei Fang,Limin Tong

DOI: https://doi.org/10.1039/c8nr10007a

IF: 6.7

2019-01-01

Nanoscale

Abstract:By using a self-assembly method, SU-8 whispering gallery mode optical microcavities with an ultra-smooth surface (σ < 0.6 nm) and high-Q factors (∼104) are fabricated. As an application of the microcavities, we demonstrate a polydimethylsiloxane packaged temperature sensor with high sensitivity (120 pm per °C) and long-term stability (over one year). These results illustrate broad application potential in ultrasensitive sensors and microlasers.
High-Q Double-Disk Microcavities for Cavity Optomechanics.

Xiaoshun Jiang,Qiang Lin,Jessie Rosenberg,Kerry Vahala,Oskar Painter

DOI: https://doi.org/10.1364/oe.17.020911

IF: 3.8

2009-01-01

Optics Express

Abstract:We design a double-disk microcavity consisting of a pair of silica microdisks separated by a nanoscale gap region on a silicon chip for cavity optomechanics. We show that this type of photonic structure can provide a per-photon gradient force with a magnitude much larger than for scattering-force-based structures. Moreover, this device provides for nearly independent optimization of optical and mechanical properties. We present the processing details of fabricated devices.
Optimal Design of Ring Resonator in Silica Optical Waveguide

MA Hui-lian,JIN Zhong-he,DING Chun,WANG Yue-lin

DOI: https://doi.org/10.3321/j.issn:0258-7025.2005.10.007

2005-01-01

Chinese Journal of Lasers

Abstract:Optical ring resonator is the key sensing unit of resonator micro optic gyro.Improving the finesse of the ring resonator is the key technique to improve the resonator micro optic gyro.This paper presents optimal design of ring resonator in silica optical waveguide using wide angle beam propagation method(WA-BPM).The results are applied to the investigation of influence of coupling coefficient of the coupler in the resonator on resonator finesse under some resonator length.Furthermore,analysis has been made of relationship between the shot-noise-limited sensitivity of resonator optic gyro and optical parameters in ring resonator.Then the ring resonator chip including input and output couplers is fabricated on GeO_2-doped silica waveguides by flame hydrolysis deposition method.Measurements show the finesse of the resonator is as high as 60.Theoretical analysis predicts that the sensitivity of 1 degree/hour performance for the resonator micro optic gyros based on this resonator can be achieved.
Research on Silica Microdisk by Wet-etching

Wen YANG,Hao LONG,Changlei GUO,Shuisen JIANG,Baoping ZHANG,Zhiping CAI,Leiying YING

DOI: https://doi.org/10.6043/j.issn.0438-0479.201611035

2017-01-01

Abstract:The whispering gallery mode (WGM) optical resonator enjoys advantages of high Q factor and small mode volume.The research on cavity quantum electrodynamics,biosensors,filters and nonlinear optics faces a very promising prospect.The microstructures of silica microdisk with different diameters(20,40,60 μm) were obtained by thermal oxidation,photolithography,magnetron sputtering,HF wet etching and KOH solution wet etching.The silicon backbone was octagonal pyramid,yielding smaller connection area with top silica microdisk and weaker inference on WGM in it.The surface of silica microdisk was also characterized by Atomic Force Microscopy.The surface of silica was smooth,and the Root-Mean-Square (RMS) roughness was 0.469 nm.The Q factor and FSR of 60 μm microdisk are 1 × 104 and 9.6 nm.
Silicon optical waveguides using photonic bandgap for bioparticle sensing

jin sun,ching eng png,e p li

DOI: https://doi.org/10.1109/APMC.2005.1607014

2005-01-01

Abstract:This paper presents a theoretical study of photonic bandgap microcavities in optical waveguide with improved performance of Q factor and transmission. The length of the microcavity and the diameter of the air holes are finely tuned. Numerical results are obtained using 3-dimensional (3-D) finite difference time domain (FDTD) method. It is shown that for certain desired resonant wavelength, the Q factor and transmission can be optimized by tuning the length of the cavity and the diameter of the two inner most air holes.
Micropascal-sensitivity ultrasound sensors based on optical microcavities

Hao Yang,Xuening Cao,Zhi-Gang Hu,Yimeng Gao,Yuechen Lei,Min Wang,Zhanchun Zuo,Xiulai Xu,Bei-Bei Li

DOI: https://doi.org/10.48550/arXiv.2211.07965

2022-11-15

Abstract:Whispering gallery mode (WGM) microcavities have been widely used for high-sensitivity ultrasound detection, due to their optical and mechanical resonances enhanced sensitivity. The ultrasound sensitivity of the cavity optomechanical system is fundamentally limited by the thermal noise. In this work, we theoretically and experimentally investigate the thermal-noise-limited sensitivity of a WGM microdisk ultrasound sensor, and optimize the sensitivity by varying the radius and thickness of the microdisk, as well as using a trench structure around the disk. Using a microdisk with a radius of 300 um and thickness of 2 um, a peak sensitivity of 1.18 uPa Hz^{-1/2} is achieved at 82.6 kHz, which is to our knowledge the record sensitivity among the cavity optomechanical ultrasound sensors. Such high sensitivity can improve the detection range of air-coupled ultrasound sensing technology.

Optics,Applied Physics
Cavity optomechanics with whispering-gallery-mode optical micro-resonators

Albert Schliesser,Tobias J. Kippenberg

DOI: https://doi.org/10.48550/arXiv.1003.5922

2010-03-31

Abstract:Parametric coupling of optical and mechanical degrees of freedom forms the basis of many ultra-sensitive measurements of both force and mechanical displacement. An optical cavity with a mechanically compliant boundary enhances the optomechanical interaction, but also gives rise to qualitatively new coupled dynamics. As early as 1967, in a pioneering work, V. Braginsky analyzed theoretically the role of radiation pressure in the interferometric measurement process, but it has remained experimentally unexplored for many decades. Here, we use whispering-gallery-mode (WGM) optical microresonators to study these radiation pressure phenomena. Optical microresonators simultaneously host optical and mechanical modes, which are systematically analyzed and optimized to feature ultra-low mechanical dissipation, photon storage times exceeding the mechanical oscillation period (i.e. the "resolved-sideband regime") and large optomechanical coupling. It is demonstrated that dynamical backaction can be employed to cool mechanical modes, i.e., to reduce their thermally excited random motion. Utilizing this novel technique together with cryogenic pre-cooling of the mechanical oscillator, the phonon occupation of mechanical radial-breathing modes could be reduced to about 60 excitation quanta. The corresponding displacement fluctuations are monitored interferometrically with a sensitivity at the level of 10^-18 m/Hz^(1/2), which is below the imprecision at the standard quantum limit (SQL). It is shown that optical measurement techniques employed here are operating in a near-ideal manner according to the principles of quantum measurement, displaying a backaction-imprecision product close to the quantum limit. An outlook on optomechanical experiments with crystalline WGM resonators and the effect of "optomechanically induced transparency" (analogous to electromagnetically induced transparency) is given.

Quantum Physics
Highly Sensitive Optical Fiber Micro-Cavity Sensors

Junfeng Jiang,Kun Liu,Shuang wang,Tianhua Xu,Xuezhi Zhang,Panpan Niu,Yize Liu,Ziyihui Wang,Zhe Yu,Tiegen Liu

DOI: https://doi.org/10.1117/12.2616471

2022-01-01

Abstract:Micro-cavity sustaining whispering gallery mode (WGM) has been widely used in physical parameter sensing and biosensing applications. We explored three type micro-cavity enhancement methods to realize highly sensitive optical fiber sensors. Firstly, optofluidic-enhanced micro-cavity optical fiber sensors are discussed. Secondly, optomechanical oscillation micro-cavity optical fiber sensor is introduced using a hollow silica microbubble cavity. Finally, fiber laser enhancement mechanism is proposed to avoid the difficulty in direct fabrication of active micro-cavity.
Radiation-pressure-driven Mechanical Oscillations in Silica Microdisk Resonators on Chip

GuanZhong Wang,MingMing Zhao,JiYang Ma,GuanYu Li,Yuan Chen,XiaoShun Jiang,Min Xiao

DOI: https://doi.org/10.1007/s11433-015-5649-8

2015-01-01

Abstract:We demonstrate radiation-pressure-driven mechanical oscillations from high optical quality factor silica microdisk resonators on chip. Mechanical quality factors of 3520 in air and 12540 in vacuum for the fundamental radial breathing modes are obtained from 73 μm-diameter silica microdisks with mechanical frequencies of ∼51 MHz. The measured mechanical oscillation threshold powers for the input light are determined to be 62.5 μW in air and down to 26.6 μW in vacuum.
A Design of Optic Fiber Pressure Sensor Based on Micro In-Fiber Ellipsoidal Cavity

Tingting WANG,Zhipeng LI,Juan SHEN

DOI: https://doi.org/10.16818/j.issn1001-5868.2017.06.006

2017-01-01

Abstract:A new type of on-line fiber Fabry-Perot (F-P) pressure sensor was proposed.The F-P cavity of the sensor is a micro-ellipsoidal air cavity,which is formed by splicing together a SMF and a solid-core PCF with the specific splicing parameters.The pressure sensor based on F-P interference principle has many advantages such as all-silica structure,simple production process and small temperature cross-talk.In this paper,the relationship between the diameter of the short axis (cavity length) and the radius of the major axis (the effective radius of the sensitive film) in the sealed ellipsoidal air F-P cavity was analyzed.The relationship between the shape of the air F-P cavity and the cavity loss was analyzed by Gaussian beam transmission theory.The relationship among the center deflection,the film thickness and the effective radius of the SiO2 sensitive membrane was analyzed.The pressure sensitive characteristic model of SiO2 film was established,and the numerical analysis and finite element simulation were carried out under the condition of uniform load.The relationship between the wavelength and the pressure was simulated,and it provided a theoretical basis for the design of optical fiber micro-pressure sensor.
1D Topological Interface States for Improving Optical Sensors

Jakob Lindenthal,Anton Widulla,Sebastian Klembt,Johannes Benduhn,Karl Leo

DOI: https://doi.org/10.1002/adom.202401185

IF: 9

2024-06-11

Advanced Optical Materials

Abstract:Demonstration of a simple, cavity‐based optical pressure sensor principle (artistic rendering) using a topologically non‐trivial dielectric mirror design to enhance light‐matter interaction. Coupled‐mode splitting is applied to improve spectral binning properties for the use of the sensor with an integrated photodiode array to collect accurate pressure readings across several mode orders. The field of compact optical microcavities has received significant research in the past decades, and a broad range of cavity‐based micromechanical sensors has been demonstrated. The present approach replaces the frequently employed, complex etched cantilever and membrane structures with a simple thin‐film system based on a compressible photonic microcavity to achieve pressure‐sensitive wavelength shifting of resonant modes. The effects of a topological dielectric mirror architecture on the light propagation in the system are extensively investigated. Topologically improved light‐matter interaction is experimentally demonstrated for systems where thin‐film devices are mounted on one side of the photonic cavity due to mechanical constraints. Coupled topological states are examined under the aspect of mode splitting and exhibit advantageous splitting tunability compared to non‐topological systems. The findings are complemented by the proposal of a simple spectral evaluation method allowing significant improvement in the precision of integrated Fabry‐Pérot sensors. The readout concept of the presented sensor allows a scalable improvement of the measurement precision by evaluating the resonant‐mode order in the deformable cavity. The experimental results and conceptual advancements provide pathways for significant improvements addressing the efficiency of light‐matter interaction in Fabry‐Pérot cavities and the readout precision of sensors incorporating thin‐film photodiodes in multimode photonic cavities.

materials science, multidisciplinary,optics
Optomechanical Sensing with On-Chip Microcavities

Yi-Wen Hu,Yun-Feng Xiao,Yong-Chun Liu,Qihuang Gong

DOI: https://doi.org/10.1007/s11467-013-0384-y

2013-01-01

Frontiers of Physics

Abstract:The coupling between optical and mechanical degrees of freedom has been of broad interest for a long time. However, it is only until recently, with the rapid development of optical microcavity research, that we are able to manipulate and utilize this coupling process. When a high Q microcavity couples to a mechanical resonator, they can consolidate into an optomechanical system. Benefitting from the unique characteristics offered by optomechanical coupling, this hybrid system has become a promising platform for ultrasensitive sensors to detect displacement, mass, force and acceleration. In this review, we introduce the basic physical concepts of cavity optomechanics, and describe some of the most typical experimental cavity optomechanical systems for sensing applications. Finally, we discuss the noise arising from various sources and show the potentiality of optomechanical sensing towards quantum-noise-limited detection.
Observation of high-Q optomechanical modes in the mounted silica microspheres

zhen shen,zhonghao zhou,changling zou,fangwen sun,chunhua dong,guangcan guo

DOI: https://doi.org/10.1364/PRJ.3.000243

IF: 7.6

2015-01-01

Photonics Research

Abstract:An efficient method to mount a coupled silica microsphere and tapered fiber system is proposed and demonstrated experimentally. For the purpose of optomechanical studies, high-quality-factor optical (Q(o) similar to 10(8)) and mechanical modes (Q(m) similar to 0.87 x 10(4)) are maintained after the mounting process. For the mounted microsphere, the coupling system is more stable and compact and, thus, is beneficial for future studies and applications based on optomechanical interactions. Especially, the packaged optomechanical system, which is tested in a vacuum chamber, paves the way toward quantum optomechanics research in cryostat. (C) 2015 Chinese Laser Press
Characterization of Microresonator-Geometry-deformation for Cavity Optomechanics.

Min Wang,Yun-Zhao Wang,Xu-Sheng Xu,Yun-Qi Hu,Gui-Lu Long

DOI: https://doi.org/10.1364/oe.27.000063

IF: 3.8

2019-01-01

Optics Express

Abstract:We have studied the effect of geometry deformation on the mechanical frequencies and quality factors for different modes in the Whispering Gallery Mode (WGM) microresonators, that is unavoidable in the practical fabrication. The subsidence of the sphere and a more general condition with fewer symmetries and complex deformation of eccentricity, subsidence, and offset are first modeled in this paper, which could tune the mechanical frequency in a much wider spectral range than the pillar-diameter-induced perturbation. we also show that the mechanical quality factors for the non-whispering-gallery mechanical mode could be increased in the order of 4 magnitudes at a specific subsidence, and form a mechanical bound state in the continuum (BIC) which is induced by the symmetry breaking and reveals new mechanisms to confine radiation. A much broader BIC window width with higher mechanical quality factor could be achieved, which is of great importance in both fundamental research and scientific applications.
Optical Whispering-Gallery-Mode Microbubble Sensors

Xuyang Zhao,Zhihe Guo,Yi Zhou,Junhong Guo,Zhiran Liu,Yuxiang Li,Man Luo,Xiang Wu

DOI: https://doi.org/10.3390/mi13040592

IF: 3.4

2022-01-01

Micromachines

Abstract:Whispering-gallery-mode (WGM) microbubble resonators are ideal optical sensors due to their high quality factor, small mode volume, high optical energy density, and geometry/design/structure (i.e., hollow microfluidic channels). When used in combination with microfluidic technologies, WGM microbubble resonators can be applied in chemical and biological sensing due to strong light–matter interactions. The detection of ultra-low concentrations over a large dynamic range is possible due to their high sensitivity, which has significance for environmental monitoring and applications in life-science. Furthermore, WGM microbubble resonators have also been widely used for physical sensing, such as to detect changes in temperature, stress, pressure, flow rate, magnetic field and ultrasound. In this article, we systematically review and summarize the sensing mechanisms, fabrication and packing methods, and various applications of optofluidic WGM microbubble resonators. The challenges of rapid production and practical applications of WGM microbubble resonators are also discussed.
Advances and Prospects for Whispering Gallery Mode Microcavities

Shancheng Yang,Yue Wang,Handong Sun

DOI: https://doi.org/10.1002/adom.201500232

IF: 9

2015-08-11

Advanced Optical Materials

Abstract:Microlasers have experienced tremendous development in the past decade and become an essential part in laser evolution, as miniature lasers provide strong optical confinement and feature greatly enhanced light–matter interactions. Among all the configurations, whispering gallery mode (WGM) microcavities and microlasers exhibit outstanding optical performances with high quality factors and small mode volumes, thus ensuring low lasing thresholds. In addition, some unique properties inherent to WGM cavities, like bi‐directional propagation and an evanescent field that spans several hundred nanometers across the boundary, can be exploited for novel applications. Therefore, designing and engineering innovative WGM microcavities and microlasers has attracted increasing research interest. The fundamentals and characteristics of WGM are introduced here, and then the developments and current status of WGM microcavities and microlasers are reviewed in terms of the evolution of fabrication techniques and built‐up materials. In particular, the melting of glassy materials in early studies, top‐down and bottom‐up approaches with semiconductors, coating structures, as well as flexible, soft microresonators in recent years are presented. Finally, the application prospects of microlasers including the wavelength manipulation, sensing and microresonator coupling, are discussed. Whispering gallery mode (WGM) microcavities and microlasers exhibit outstanding optical performances with high quality factors and small mode volumes, which ensure low lasing thresholds. The WGM fundamentals and advances in the fabrication methodologies, as well as the application prospects including wavelength modulation, sensitive biological and chemical sensors, and coupling mechanisms are presented.

materials science, multidisciplinary,optics
Rolled-up Optical Microcavities with Subwavelength Wall Thicknesses for Enhanced Liquid Sensing Applications.

Gaoshan Huang,Vladimir A. Bolanos Quinones,Fei Ding,Suwit Kiravittaya,Yongfeng Mei,Oliver G. Schmidt

DOI: https://doi.org/10.1021/nn100456r

IF: 17.1

2010-01-01

ACS Nano

Abstract:Microtubular optical microcavities from rolled-up ring resonators with subwavelength wall thicknesses have been fabricated by releasing prestressed SiO/SiO(2) bilayer nanomembranes from photoresist sacrificial layers. Whispering gallery modes are observed in the photoluminescence spectra from the rolled-up nanomembranes, and their spectral peak positions shift significantly when measurements are carried out in different surrounding liquids, thus indicating excellent sensing functionality of these optofluidic microcavities. Analytical calculations as well as finite-difference time-domain simulations are performed to investigate the light confinement in the optical microcavities numerically and to describe the experimental mode shifts very well. A maximum sensitivity of 425 nm/refractive index unit is achieved for the microtube ring resonators, which is caused by the pronounced propagation of the evanescent field in the surrounding media due to the subwavelength wall thickness design of the microcavity. Our optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bioanalytic systems.
Cavity optomechanics on a microfluidic resonator with water and viscous liquids

Kyu Hyun Kim,Gaurav Bahl,Wonsuk Lee,Jing Liu,Matthew Tomes,Xudong Fan,Tal Carmon

DOI: https://doi.org/10.1038/lsa.2013.66

2012-10-16

Abstract:Currently, optical- or mechanical-resonances are commonly used in microfluidic research. However, optomechanical oscillations by light pressure were not shown with liquids. This is because replacing the surrounding air with water inherently increases the acoustical impedance and hence the associated acoustical radiation-losses. Here, we bridge between microfluidics and optomechanics by fabricating hollow bubble resonators with liquid inside and optically exciting 100-MHz vibrations with only mW optical-input power. This constitutes the first time that any microfluidic system is optomechanically actuated. We further prove the feasibility of microfluidic optomechanics on liquids by demonstrating vibrations on organic fluids with viscous-dissipation higher than blood viscosity while measuring density changes in the liquid via the vibration frequency shift. Our device will enable using cavity optomechanics for studying non-solid phases of matter.

Optics
Optical Fiber Gas Pressure Sensor Based on Polydimethylsiloxane Microcavity

Xiangyu Wei,Xiaokang Song,Chang Li,Liangtao Hou,Zhaojun Li,Yan Li,Lingling Ran

DOI: https://doi.org/10.1109/jlt.2021.3054883

IF: 4.7

2021-05-01

Journal of Lightwave Technology

Abstract:Xiangyu Wei, Xiaokang Song, Chang Li, Liangtao Hou, Zhaojun Li, Yan Li, Lingling Ran<br/>We experimentally demonstrated a high sensitive gas pressure sensor, which also has more concise processing steps and lower cost. The ... [J. Lightwave Technol. 39, 2988-2993 (2021)]

engineering, electrical & electronic,optics,telecommunications

Design and performance simulation of a silica microdisk cavity optical pressure sensor

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

A New Route for Fabricating Polymer Optical Microcavities.

High-Q Double-Disk Microcavities for Cavity Optomechanics.

Optimal Design of Ring Resonator in Silica Optical Waveguide

Research on Silica Microdisk by Wet-etching

Silicon optical waveguides using photonic bandgap for bioparticle sensing

Micropascal-sensitivity ultrasound sensors based on optical microcavities

Cavity optomechanics with whispering-gallery-mode optical micro-resonators

Highly Sensitive Optical Fiber Micro-Cavity Sensors

Radiation-pressure-driven Mechanical Oscillations in Silica Microdisk Resonators on Chip

A Design of Optic Fiber Pressure Sensor Based on Micro In-Fiber Ellipsoidal Cavity

1D Topological Interface States for Improving Optical Sensors

Optomechanical Sensing with On-Chip Microcavities

Observation of high-Q optomechanical modes in the mounted silica microspheres

Characterization of Microresonator-Geometry-deformation for Cavity Optomechanics.

Optical Whispering-Gallery-Mode Microbubble Sensors

Advances and Prospects for Whispering Gallery Mode Microcavities

Rolled-up Optical Microcavities with Subwavelength Wall Thicknesses for Enhanced Liquid Sensing Applications.

Cavity optomechanics on a microfluidic resonator with water and viscous liquids

Optical Fiber Gas Pressure Sensor Based on Polydimethylsiloxane Microcavity