A Design of Optic Fiber Pressure Sensor Based on Micro In-Fiber Ellipsoidal Cavity

Tingting WANG,Zhipeng LI,Juan SHEN

DOI: https://doi.org/10.16818/j.issn1001-5868.2017.06.006

2017-01-01

Abstract:A new type of on-line fiber Fabry-Perot (F-P) pressure sensor was proposed.The F-P cavity of the sensor is a micro-ellipsoidal air cavity,which is formed by splicing together a SMF and a solid-core PCF with the specific splicing parameters.The pressure sensor based on F-P interference principle has many advantages such as all-silica structure,simple production process and small temperature cross-talk.In this paper,the relationship between the diameter of the short axis (cavity length) and the radius of the major axis (the effective radius of the sensitive film) in the sealed ellipsoidal air F-P cavity was analyzed.The relationship between the shape of the air F-P cavity and the cavity loss was analyzed by Gaussian beam transmission theory.The relationship among the center deflection,the film thickness and the effective radius of the SiO2 sensitive membrane was analyzed.The pressure sensitive characteristic model of SiO2 film was established,and the numerical analysis and finite element simulation were carried out under the condition of uniform load.The relationship between the wavelength and the pressure was simulated,and it provided a theoretical basis for the design of optical fiber micro-pressure sensor.