An Optical Fiber Pressure Sensor Based on F-P Interferometry and Intensity Demodulation

DENG Yuan-long,ZHAO Xiao-li,LI Xue-jin,GENG You-fu,HONG Xue-ming,QIU Cheng-jun
DOI: https://doi.org/10.3969/j.issn.1000-2618.2011.01.002
2011-01-01
Abstract:An optical fiber pressure sensor was designed,fabricated and characterized.It employed a Fabry-Perot (F-P) interferometer and simple intensity-demodulation technology.A square silicon cup processed by anisotropic etching serves as sensitive element for the better consistency than that of circular diaphragm.A large area ratio of the moving mirror to the stationary one is introduced to reduce the nonlinearity due to the non-planarity of the deflection.Reference light generated from a 2×2 optical fiber coupler is used to decrease the influence of intensity variations of the light source.Single-value measurement was achieved under the pressure range from 0 to 38 kPa.The experimental results demonstrate an upmost relative sensitivity of 0.7%/kPa and a reasonable repeatability,consisting well with the theoretical analysis and simulation.A new method of multi-wave or multi-sensor is presented to expand the measurement range with high sensitivity.
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