Sensitivity-enhanced Optical Sensor Based on Multilayer Coated Fabry–Pérot Interferometer

Tuo Chen,Hui-Hui Zhu,Chang Su,Zi-Wei Cao,Qiu-Shun Li,Ming-Yu Li
DOI: https://doi.org/10.1117/1.oe.61.1.017102
IF: 1.3
2022-01-01
Optical Engineering
Abstract:A high-sensitivity optical sensor based on a Fabry-Perot interferometer (FPI) has been demonstrated. The cavity of the FPI is formed by two parallel half-reflective film-coated glass substrates with a distance of 1 mm and works as the sensing area. The interaction between the propagating wave and the analyte gives the sensing signal. High sensitivity of 1149 nm/RIU has been achieved for the wavelength interrogation. The Fabry-Perot sensor can be made into a large array with multiple microfluidic channels to detect the different types of analytes. It has great potential in biochemical sensing. (C) 2022 Society of Photo-Optical Instrumentation Engineers (SPIE)
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