A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure

Bowen Duan,Zhenyin Hai,Maocheng Guo,Yongqiu Zheng,Jiamin Chen,Jiandong Bai,Zhixuan Su,Rui Liang,Hongtian Zhu,Qi Zhang,Chenyang Xue
DOI: https://doi.org/10.3390/mi15020174
IF: 3.4
2024-01-24
Micromachines
Abstract:In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry–Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry–Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor's Fabry–Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0–10 MPa in the temperature range of 20–370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
What problem does this paper attempt to address?
### The Problem the Paper Attempts to Solve This paper aims to address the issue of pressure measurement in high-temperature and high-pressure environments. Specifically, existing fiber optic Fabry–Perot pressure sensors face challenges such as high technical difficulty, limited pressure measurement range, and low sensitivity in such conditions. To this end, the authors propose a fiber optic Fabry–Perot pressure sensor based on a membrane-hole structure. This sensor has the following features: - **Enhanced Sensitivity**: By adopting a large cavity structure, the sensor's pressure range and sensitivity are significantly improved. - **Simplified Design**: Utilizing a three-layer sapphire direct bonding structure, the design is simple and robust, allowing for efficient mass production. - **Improved Pressure Resistance**: It avoids issues related to different thermal strain coefficients caused by etching and coating processes, thereby enhancing the sensor's temperature resistance and thermal stability. - **Wide Measurement Range**: Capable of measuring a wide pressure range from 0 to 10 MPa within a temperature range of 20 to 370°C. - **High Sensitivity**: The sensor sensitivity is 918.9 nm/MPa, with a temperature coefficient of 0.0695 nm/(MPa·°C), and the error across the entire temperature range is better than 2.312%. In summary, the new sensor design proposed in this paper aims to overcome the limitations of existing sensors in high-temperature and high-pressure environments and improve their performance.