Membrane-free fiber-optic Fabry-Perot gas pressure sensor with Pa-level resolution

Xiaoli Zhang,Xinlei Zhou,Yewei Chen,Pengcheng Tao,Fengxiang Ma,Qingxu Yu,Wei Peng
DOI: https://doi.org/10.1016/j.optlastec.2022.107940
2022-06-01
Abstract:A highly sensitive fiber-optic Fabry-Perot sensor based on femtosecond (fs) laser micromachining is proposed and demonstrated for gas pressure measurement. The sensor is fabricated by inserting two single mode fibers (SMFs) into a capillary. A fs laser is employed to drill a micro-channel on the wall of the capillary to allow gas diffuse in. Due to the linear relationship between the pressure and the refractive index (RI) of the gas, the gas pressure can be detected by investigating the optical cavity length. The signal is demodulated by using the white-light interferometry (WLI) method based on digital cross-correlation technology. The sensitivity of the proposed pressure sensors is investigated theoretically and experimentally. The sensitivity of the sensor with a cavity length of 2926 μm is 7702 nm/MPa. In addition, a good repeatability and a high resolution of 4.9 Pa of the proposed sensor have been demonstrated. Due to the miniature size, wide dynamic range, high stability, high sensitivity and high resolution, the membrane-free fiber-optic Fabry-Perot sensor with Pa-level resolution has a wide application for gas pressure detection.
optics,physics, applied
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