Abstract:We describe the use of monolithic, buckled-dome cavities as ultrasound sensors. Patterned delamination within a compressively stressed thin film stack produces high-finesse plano-concave optical resonators with sealed and empty cavity regions. The buckled mirror also functions as a flexible membrane, highly responsive to changes in external pressure. Owing to their efficient opto-acousto-mechanical coupling, thermal-displacement-noise limited sensitivity is achieved at low optical interrogation powers and for modest optical (Q ~ 10^3) and mechanical (Q ~ 10^2) quality factors. We predict and verify broadband (up to ~ 5 MHz), air-coupled ultrasound detection with noise-equivalent pressure (NEP) as low as ~ 30-100 $\mu$Pa/Hz^1/2. This corresponds to an ultrasonic force sensitivity ~ 2 x 10^-13 N/Hz^1/2 and enables the detection of MHz-range signals propagated over distances as large as ~ 20 cm in air. In water, thermal-noise-limited sensitivity is demonstrated over a wide frequency range (up to ~ 30 MHz), with NEP as low as ~ 100-800 $\mu$Pa/Hz^1/2. These cavities exhibit a nearly omnidirectional response, while being ~ 3-4 orders of magnitude more sensitive than piezoelectric devices of similar size. Easily realized as large arrays and naturally suited to direct coupling by free-space beams or optical fibers, they offer significant practical advantages over competing optical devices, and thus could be of interest for several emerging applications in medical and industrial ultrasound imaging.

Micropascal-sensitivity ultrasound sensors based on optical microcavities

High sensitivity air-coupled MHz frequency ultrasound detection using on-chip microcavities

High-Sensitivity Air-Coupled Megahertz-Frequency Ultrasound Detection Using On-Chip Microcavities

Ultrasound sensing with optical microcavities

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

High sensitivity air-coupled MHz frequency ultrasound detection using an on-chip microtoroid cavity

Ultrasound Detection Using a Thermal-Assisted Microcavity Raman Laser

An Encapsulated Optical Microsphere Sensor for Ultrasound Detection and Photoacoustic Imaging

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Ultrasound Measurement Using On-Chip Optical Micro-Resonators and Digital Optical Frequency Comb

Polymer Microring Resonators for High Sensitivity, Broadband, Wide-Directivity Ultrasound Detection and High-Resolution Imaging

Noise Suppression of Mechanical Oscillations in a Microcavity for Ultrasensitive Detection.

Ultrabroad Bandwidth and Highly Sensitive Optical Ultrasonic Detector for Photoacoustic Imaging

Whispering-gallery Optical Microprobe for Photoacoustic Imaging

Highly Sensitive Optical Fiber Micro-Cavity Sensors

Ultrasound sensing at thermomechanical limits with optomechanical buckled-dome microcavities

Optical sensing with whispering-gallery microcavities

Heterodyne Detection of Backscattering for Whispering-Gallery-mode Sensors

Sensing and Lasing Applications of Whispering Gallery Mode Microresonators

Design and performance simulation of a silica microdisk cavity optical pressure sensor

Optical Microscopic Evanescent Sensing of Ultrasound With Ultrabroad Bandwidth