Abstract:Abstract High-precision detection of electric charge is critical for physical, chemical, and biological measurements. Nanophotonic optomechanical system confines the optical field at the nanoscale and enables a strong interaction between optical cavity and mechanical resonator. Its high optical quality factor cavity and strong optomechanical coupling are promising for precision sensing applications. Here an integrated optomechanical electrometer is proposed for the electric charge sensing using a zipper cavity with a suspended photonic crystal nanobeam (PCN) acting as a movable mechanical resonator. As the electrostatic force arising from the electric voltage to be measured interacts with the mechanical motion of the movable PCN and modulates its resonance through electrostatic stiffening effect, optomechanical coupling transduces the mechanical motion to the optical field with enhanced sensitivity. The resonance shift of the mechanical resonator can be monitored to detect the electric voltage with a sensitivity of 0.007 Hz / m V 2 $\mathrm{Hz}/\mathrm{m}{\mathrm{V}}^{2}$ . Moreover, the sensing performance can be further enhanced with the operation of the optomechanical electrometer in the self-sustained oscillation above threshold power. Owing to the narrow-linewidth of detector radio frequency (RF) spectrum with a large peak-to-noise floor ratio (up to 73.5 dB), the enhanced electrical sensitivity of 0.014 Hz / m V 2 $\mathrm{Hz}/\mathrm{m}{\mathrm{V}}^{2}$ is achieved with a high resolution of 1.37 m V 2 H z − 1 / 2 $1.37\,\mathrm{m}{\mathrm{V}}^{2}\mathrm{H}{\mathrm{z}}^{-1/2}$ . A theoretical minimal detectable electrostatic charge is calculated as 1.33 × 10 − 2 eH z − 1 / 2 $1.33{\times}{10}^{-2}\,\mathrm{eH}{\mathrm{z}}^{-1/2}$ by converting the measured electric voltage versus RF shift to an approximatively linear relationship. This on-chip optomechanical electrometry scheme provides a powerful solution to the ultrasensitive determination of charged nanoparticles in biological and chemical applications.

Noise Suppression of Mechanical Oscillations in a Microcavity for Ultrasensitive Detection.

Sensitivity Dependence of Single Nanoparticle Mass Detection Using Mechanical Oscillations in Optical Microcavities

Ultrasensitive charge detection utilizing coupled nonlinear micromechanical resonators

Single Nanoparticle Detection Using Optical Microcavities

Optomechanical Sensing with On-Chip Microcavities

Suppression of extraneous thermal noise in cavity optomechanics

Acoustic-optomechanical oscillator for low noise equivalent pressure and large broadband response acoustic sensing applications

Micropascal-sensitivity ultrasound sensors based on optical microcavities

High resolution acoustic sensing based on microcavity optomechanical oscillator

Brillouin Cavity Optomechanics Sensing with Enhanced Dynamical Backaction

High sensitivity air-coupled MHz frequency ultrasound detection using on-chip microcavities

High-Sensitivity Air-Coupled Megahertz-Frequency Ultrasound Detection Using On-Chip Microcavities

Highly Sensitive Optical Fiber Micro-Cavity Sensors

Noise Suppression of Relaxation Oscillation Intensity in a Microcavity Raman Laser

Enhanced sensing resolution with microcavity mode oscillation generated by thermal-optic and photorefractive nonlinearity

High sensitivity air-coupled MHz frequency ultrasound detection using an on-chip microtoroid cavity

Ultrasensitive nanoscale optomechanical electrometer using photonic crystal cavities

Dissipative Acousto-optic Interactions in Optical Microcavities.

Dual Sensitization Enhancement in Cavity Optomechanics for Ultra-High Resolution Temperature Sensing

Optical Microcavity Sensing: from Reactive to Dissipative Interactions (conference Presentation)

Optical Frequency Comb-Based Aerostatic Micro Pressure Sensor Aided by Machine Learning