Abstract: Cavity optomechanical systems provide an ideal platform for ultrasound sensing, due to its dual-resonance enhanced sensitivity. Here we realize high sensitivity air-coupled ultrasound sensing in the megahertz (MHz) frequency range, using a microtoroid cavity. Benefitting from both the high optical Q factor (~10^7) and mechanical Q factor (~700), we achieve sensitivity of 46 {\mu}Pa/Hz^1/2 -10 mPa/Hz^1/2 in a frequency range of 0.25-3.2 MHz. Thermal-noise-limited sensitivity is realized around the mechanical resonance at 2.56 MHz, in a frequency range of 0.6 MHz. We also observe the second- and third-order mechanical sidebands, when driving the microcavity with an ultrasonic wave at the mechanical resonance and quantitatively study the intensities of each mechanical sideband as a function of the mechanical displacement. Measuring the combination of signal to noise ratios at all the sidebands has the potential to extend the dynamic range of displacement sensing.

High sensitivity air-coupled MHz frequency ultrasound detection using an on-chip microtoroid cavity