Polymer Microring Resonators for High Sensitivity, Broadband, Wide-Directivity Ultrasound Detection and High-Resolution Imaging

Sung-Liang Chen,Tao Ling,L. Jay Guo

DOI: https://doi.org/10.1117/12.916162

2012-01-01

Abstract:Optical detection of ultrasound is an emerging technique based on the interaction of strain field and optical field, modulating the optical properties of the resonance cavity for sensitive detection. Such a detection scheme can have several unique advantages, such as broadband response and size-independent sensitivity, compared with conventional piezoelectric transducers. Detector's high sensitivity is essential for deep penetration depth, especially for high-resolution imaging because of the strong attenuation of high-frequency ultrasound. Besides, small element size has the advantage of realizing wide acceptance angle of ultrasound detection. Previously we have demonstrated optical-based ultrasound detectors using polymer microring resonators, showing flat spectral response from dc to high frequency, over 90 MHz at -3-dB. By improving the fabrication process, we are able to achieve a new generation device with higher sensitivity and smaller element size. An ultralow noise-equivalent pressure of 21.4 Pa over 1-75 MHz range has been achieved using a fabricated detector of 60 mu m diameter. We will mainly demonstrate its applications to photoacoustic imaging, including photoacoustic computed tomography and photoacoustic microscopy. The new generation device can also be applied to other ultrasound-related imaging and detection.