Abstract:Optomechanical crystals are combinations of photonic and phononic crystals, which simultaneously control optical and acoustic waves with nanoscale periodic structure and form optomechanical systems with high mechanical frequency and lager photon-phonon interaction. We proposed a nanobeam cavity based on hetero optomechanical crystal with two types of periodic structures, where the optical and mechanical modes separately confined by two periodic structures. A mechanical frequency as high as 5.66 GHz was achieved while the working wavelength of the optical cavity was maintained at 1.55 μm. Besides, due to the flexibility introduced by the hetero structure, the optical field and the strain field were designed to be concentrated inside the optomechanical cavities and resemble each other with an enhanced overlap. As a result, the optomechanical coupling rate, which represents the interaction strength between photon and phonon, was as high as 1.31 MHz. Also we proposed and optimized an optomechanical crystal nanobeam cavity, only by increasing the radius of air holes in the defect region, for small effective mass. A very small effective mass of 85 fg was estimated. By far, the on-chip cavity optomechanical systems has to be with the help of tapered fibers or one-sided waveguide with circulator to couple the light into or out. Here we demonstrated larger center-hole nanobeam structures with on-chip transmission waveguide coupling. The mechanical frequency was measured up to 4.47 GHz, with a high mechanical Q-factor of 1.4 × 103 in ambient environment. The corresponding optomechanical coupling rate and the effective mass were estimated to be 836 kHz and 136 fg, respectively. With transmission waveguide coupled structure and small footprint of only 3.4 μm2, this simple cavity can be directly used as functional components and integrated with other on-chip devices in future practical applications.

High-Q Double-Disk Microcavities for Cavity Optomechanics.

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Stacked Integrated Double-Disks for Cavity Optomechanics

Design of A Femtogram Scale Double-Slot Photonic Crystal Optomechanical Cavity

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

High-Q Photonic Crystal Microcavities

Strong Optical Confinement between Non-periodic Flat Dielectric Gratings

Integrated microcavity optomechanics with a suspended photonic crystal mirror above a distributed Bragg reflector

Cavity Optomechanics with Photonic Bound States in the Continuum

Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator

Integrated Optomechanical Crystal Cavity

Mechanical Oscillation and Cooling Actuated by the Optical Gradient Force

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Design and performance simulation of a silica microdisk cavity optical pressure sensor

Optomechanical Coupling Optimization in Engineered Nanocavities

Integrated optical-readout of a high-Q mechanical out-of-plane mode

Optomechanical Sensing with On-Chip Microcavities

Cavity Optomechanics: Manipulating Photons and Phonons Towards the Single-Photon Strong Coupling

High-mechanical-frequency Characteristics of Optomechanical Crystal Cavity with Coupling Waveguide.

Cavity nano-optomechanics: a nanomechanical system in a high finesse optical cavity

Integrated Ultra-High-Q Optical Resonator